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首页> 外文会议>Conference on Active and passive smart structures and integrated systems; 20090309-12; San Diego, CA(US) >Vibration Control of Piezoelectrically Actuated Microcantilevers
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Vibration Control of Piezoelectrically Actuated Microcantilevers

机译：压电微悬臂梁的振动控制

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摘要

The vibration control of microelectromechanical structures is an interesting and challenging research area that is extensively applicable in micro-mass measurement, micro-sensors and micro-mirror control. An active vibration control technique based on positive position feedback method is constructed in this paper. This method is used to control the vibration of microcantilevers through actuation of a piezoelectric layer that covers one side of the microcantilever. The modified version of positive position feedback used in this paper, employs a second order compensator for vibration suppression, and a first order compensator provides damping. Since the positive position feedback control is based on strain sensing approach, it is extensively applied to piezoelectrically controlled microcantilevers. Similar to conventional positive position feedback, stability conditions are global and independent of the dynamical characteristics of the open-loop system. Root locus diagrams are used to find proper compensator frequency and damping of the closed loop system. A numerical simulation is performed to evaluate the performance of the modified positive position feedback for both steady-state and transient dynamic control. The results indicate that the proposed method is more effective in controlling both steady-state and transient dynamics than conventional positive position feedback.
机译：微机电结构的振动控制是一个有趣且具有挑战性的研究领域，广泛应用于微质量测量，微传感器和微镜控制。本文建立了一种基于正位置反馈的主动振动控制技术。该方法用于通过致动覆盖微悬臂一侧的压电层来控制微悬臂的振动。本文使用的正位置反馈的改进版本采用了二阶补偿器来抑制振动，而一阶补偿器则提供了阻尼。由于正位置反馈控制基于应变感测方法，因此已广泛应用于压电控制的微悬臂梁。与常规的正位置反馈类似，稳定性条件是全局的，并且与开环系统的动力学特性无关。根轨迹图用于找到合适的补偿器频率和闭环系统的阻尼。进行了数值模拟，以评估针对稳态和瞬态动态控制的修正正位置反馈的性能。结果表明，与常规的正位置反馈相比，该方法在控制稳态和瞬态动力学方面更为有效。

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