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Evaluation of Schottky Contact Parameters in MSM-Photodiode Structures

机译:MSM光电二极管结构中肖特基接触参数的评估

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摘要

The electrical behavior of metal-semiconductor-metal (MSM) Schottky barrier photodiode structures is analyzed by means of current-voltage (I-V) measurements at different temperatures. The reverse characteristics of the Schottky contact are examined by taking into account the barrier height dependence on the eletric field and tunneling through the barrier. It is shown that, under these conditions the I-V measurements can be used as a fast and simple method to evaluate the barrier height, saturation current density and junction ideality factor of the MSM-photodiode Schottky contact. The results are well consistent with experiment.
机译:通过在不同温度下的电流-电压(I-V)测量来分析金属-半导体-金属(MSM)肖特基势垒光电二极管结构的电性能。通过考虑势垒高度对电子场的依赖性以及通过势垒的隧穿来检查肖特基接触的反向特性。结果表明,在这些条件下,I-V测量可以用作评估MSM光电二极管肖特基接触的势垒高度,饱和电流密度和结理想因子的快速简便的方法。结果与实验吻合良好。

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