The MEMS micro scanning mirror for barcode reading: From development to production

机译：用于条码读取的MEMS微扫描镜：从开发到生产

获取原文

获取原文并翻译 | 示例

页面导航

摘要
著录项
相似文献
相关主题

摘要

The micro scanning mirror with lateral out-of-plane comb drives is on its way to volume fabrication. This article reviews the development and highlights the most important activities and decisions that are representative for many MEMS devices that are supposed to go the same way. Careful analysis of the product requirements, design for reliability, design for testability, design for packaging, a mature process, and automated testing preferably on wafer-level have been identified as keys to volume fabrication of MEMS.

机译：带有横向平面外梳状驱动器的微型扫描镜正在批量生产中。本文回顾了开发过程，重点介绍了代表许多应该采用相同方法的MEMS器件的最重要的活动和决策。对产品要求的仔细分析，可靠性设计，可测试性设计，包装设计，成熟工艺以及最好在晶圆级进行自动化测试已被确定为MEMS批量生产的关键。

著录项

来源
《Conference on MOEMS Display and Imaging Systems II; Jan 26-27, 2004; San Jose, California, USA》|2004年|p.32-39|共8页
会议地点 San Jose CA(US)
作者
Alexander Wolter; Harald Schenk; Eric Gaumont; Hubert Lakner;
展开▼
作者单位

Fraunhofer of Institute Photonic Microsystems, Grenzstr. 28, D-01099 Dresden, Germany;

展开▼
会议组织
原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
关键词
bar code scanning; micro scanning mirror; optical MEMS; MOEMS; laser beam deflection; bulk-micromachining; out-of-plane comb drive;

机译：条形码扫描;微扫描镜;光学MEMS; MOEMS;激光束偏转;批量微加工;面外梳状驱动;

相似文献

外文文献
中文文献
专利

1. Multiscale high-speed photoacoustic microscopy based on free-space light transmission and a MEMS scanning mirror [J] . Zhang Chen, Zhao Huangxuan, Xu Song, Optics Letters . 2020,第15期

机译：基于自由空间灯传动和MEMS扫描镜的多尺度高速光声显微镜
2. Spontaneous Parametric Down-Conversion Induced by Non-Degenerate Three-Wave Mixing in a Scanning MEMS Micro Mirror [J] . Ulrike Nabholz, Frank Schatz, Jan E. Mehner, Scientific reports. . 2019,第1期

机译：通过在扫描MEMS微镜中的非退化三波混合引起的自发参数下转换
3. Photoacoustic endomicroscopy based on a MEMS scanning mirror [J] . Guo Heng, Song Chaolong, Xie Huikai, Optics Letters . 2017,第22期

机译：基于MEMS扫描镜的光声反应器
4. The MEMS micro scanning mirror for barcode reading: From development to production [C] . Alexander Wolter, Harald Schenk, Eric Gaumont, Society of Photo-Optical Instrumentation Engineers Conference on MOEMS Display and Imaging Systems . 2004

机译：用于条形码读数的MEMS微扫描镜：从开发到生产
5. MEMS three-dimensional scan mirror for an endoscopic confocal microscope. [D] . Shao, Yuhe. 2005

机译：用于内窥镜共聚焦显微镜的MEMS三维扫描镜。
6. Development of an Electrostatic Comb-Driven MEMS Scanning Mirror for Two-Dimensional Raster Scanning [O] . Qiang Wang, Weimin Wang, Xuye Zhuang, 2021

机译：用于二维光栅扫描的静电梳理MEMS扫描镜的开发
7. Wide-field fast-scanning photoacoustic microscopy based on a water-immersible MEMS scanning mirror [O] . Yao Junjie, Huang Chih-Hsien, Wang Lidai, 2012

机译：基于水浸式MEMS扫描镜的广域快速扫描光声显微镜

The MEMS micro scanning mirror for barcode reading: From development to production

摘要

著录项

相似文献

相关主题

期刊订阅