The MEMS micro scanning mirror for barcode reading: From development to production

机译：用于条形码读数的MEMS微扫描镜：从开发到生产

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The micro scanning mirror with lateral out-of-plane comb drives is on its way to volume fabrication. This article reviews the development and highlights the most important activities and decisions that are representative for many MEMS devices that are supposed to go the same way. Careful analysis of the product requirements, design for reliability, design for testability, design for packaging, a mature process, and automated testing preferably on wafer-level have been identified as keys to volume fabrication of MEMS.

机译：具有横向外平面梳状梳状的微扫描镜在其途中进行体积制造。本文审查了该开发，突出了最重要的活动和决策，这些活动和决定是许多应该同样的MEMS设备的代表性。仔细分析产品要求，设计可靠性，设计可测试性，用于包装的设计，成熟的过程和自动化测试优选地被鉴定为键对MEMS的体积制备的键。

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《Society of Photo-Optical Instrumentation Engineers Conference on MOEMS Display and Imaging Systems》|2004年||共8页
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Alexander Wolter; Harald Schenk; Eric Gaumont; Hubert Lakner;
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原文格式 PDF
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中图分类 N-532;
关键词
bar code scanning; micro scanning mirror; optical MEMS; MOEMS; laser beam deflection; bulk-micromachining; out-of-plane comb drive;

机译：条形码扫描;微扫描镜;光学MEMS;MOEMS;激光束偏转;散装微机械;外平面梳子驱动;

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2. Spontaneous Parametric Down-Conversion Induced by Non-Degenerate Three-Wave Mixing in a Scanning MEMS Micro Mirror [J] . Ulrike Nabholz, Frank Schatz, Jan E. Mehner, Scientific reports. . 2019,第1期

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3. Photoacoustic endomicroscopy based on a MEMS scanning mirror [J] . Guo Heng, Song Chaolong, Xie Huikai, Optics Letters . 2017,第22期

机译：基于MEMS扫描镜的光声反应器
4. The MEMS micro scanning mirror for barcode reading: From development to production [C] . Alexander Wolter, Harald Schenk, Eric Gaumont, Conference on MOEMS Display and Imaging Systems II; Jan 26-27, 2004; San Jose, California, USA . 2004

机译：用于条码读取的MEMS微扫描镜：从开发到生产
5. MEMS three-dimensional scan mirror for an endoscopic confocal microscope. [D] . Shao, Yuhe. 2005

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6. Development of an Electrostatic Comb-Driven MEMS Scanning Mirror for Two-Dimensional Raster Scanning [O] . Qiang Wang, Weimin Wang, Xuye Zhuang, 2021

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7. Wide-field fast-scanning photoacoustic microscopy based on a water-immersible MEMS scanning mirror [O] . Yao Junjie, Huang Chih-Hsien, Wang Lidai, 2012

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The MEMS micro scanning mirror for barcode reading: From development to production

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