High efficiency optical MEMS by the integration of photonic lattices with Surface MEMS

机译：通过将光子晶格与Surface MEMS集成来实现高效光学MEMS

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An overview is given of the integration of 1, 2 and 3 dimensional photonic lattice structures with surface MEMS (MicroElectroMechanical Systems). The properties of the photonic lattice arise as a result of a high index contrast between two or more media arranged in an appropriate fashion. Increased photonic lattice functionality is obtained as the arrangement of high and low index materials is extended into other dimensions. Potential photonic lattice functions which can be integrated with surface MEMS include mirrors, cavities and wavelength dependent switches in 1-D, waveguides and prisms in 2-D and 3-D waveguides, prisms, polarization, dispersion, thermal and spontaneous emission control in 3-D.

机译：概述了将1维，2维和3维光子晶格结构与表面MEMS（MicroElectroMechanical Systems）集成在一起。光子晶格的特性是由于以适当方式排列的两种或更多种介质之间的高折射率对比度而产生的。随着高折射率材料和低折射率材料的排列扩展到其他尺寸，可以获得更高的光子晶格功能。可以与表面MEMS集成的潜在光子晶格功能包括1D中的反射镜，腔和与波长相关的开关，2D和3D波导中的波导和棱镜，3中的棱镜，偏振，色散，热和自发发射控制-D

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来源
《Conference on MOEMS and Miniaturized Systems Ⅱ Oct 22-24, 2001, San Francisco, USA》|2001年|p.183-188|共6页
会议地点 San Francisco CA(US)
作者
J.G. Fleming; Seethambal Mani; Shawn-Yu Lin;
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作者单位

Sandia National Laboratories Albuquerque NM 87185;

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原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
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2. Optical MEMS for photonic switching-compact and stable optical crossconnect switches for simple, fast, and flexible wavelength applications in recent photonic networks [J] . Yano M., Yamagishi F., Tsuda T. IEEE journal of selected topics in quantum electronics . 2005,第2期

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3. Three-Dimensional Hybrid Integration Technology of CMOS, MEMS, and Photonics Circuits for Optoelectronic Heterogeneous Integrated Systems [J] . Lee K.-W.Noriki A.Kiyoyama K.Fukushima T.Tanaka T.Koyanagi M. Electron Devices, IEEE Transactions on . 2011,第3期

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4. High efficiency optical MEMS by the integration of photonic lattices with Surface MEMS [C] . Shawn-Yu Lin, Seethambal Mani, J.G. Fleming Conference on MOEMS and miniaturized systems . 2001

机译：高效光学MEMS通过表面MEMS的光子晶格集成
5. Photonic crystal mirrors: Fundamental components for integrated photonic crystal optical MEMS. [D] . Kim, Sora. 2009

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6. Handheld miniature probe integrating diffuse optical tomography with photoacoustic imaging through a MEMS scanning mirror [O] . Hao Yang, Lei Xi, Sean Samuelson, 2013

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7. High Efficiency Optical MEMS by the Integration of Photonic Lattices with Surface MEMS [O] . Fleming, James G., Lin, Shawn-Yu, Mani, Seethambal S., 2002

机译：光子晶格与表面mEms集成的高效光学mEms
8. High Efficiency Optical MEMS by the Integration of Photonic Lattices with Surface MEMS [R] . Fleming, J. G., Lin, S. Y., Mani, S. S., 2002

机译：光子晶格与表面mEms集成的高效光学mEms

High efficiency optical MEMS by the integration of photonic lattices with Surface MEMS

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