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首页> 外文会议>Damage to VUV, EUV, and X-ray optics IV; and EUV and X-ray optics: synergy between laboratory and space III >Slumping of Si wafers at high temperature
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Slumping of Si wafers at high temperature

机译：高温下硅片的塌落

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Space X-ray imaging telescopes have delivered unique observations that have been significantly contributing to many important discoveries of current astrophysics. For future telescopes with a larger collecting area and a better angular resolution, the limiting factor is their X-ray reflecting mirror array. Therefore, for a successful construction of future lightweight and highly reflecting X-ray mirrors, new cost-effective technologies and progressive materials are needed. Currently, the very promising materials are silicon foils which are commercially produced on a large scale. We focused on the plastic deformation of thin monocrystalline silicon foils, which was necessary for the precise thermal forming of the foils to 3D shapes. To achieve the plastic deformation, we applied forced slumping at temperatures from 1200 to 1400℃. The final shapes and the surface quality of the foils were measured using a Taylor Hobson contact profilometer and examined with an Atomic Forced Microscopy. We studied the effects of temperature, applied slumping force, heat-treatment time, crystal orientation, and furnace atmosphere on the shape and surface quality of the formed foils.
机译：空间X射线成像望远镜已经提供了独特的观测结果，这些观测结果为当前的天体物理学的许多重要发现做出了重大贡献。对于具有更大收集面积和更好的角分辨率的未来望远镜，限制因素是它们的X射线反射镜阵列。因此，为了成功构建未来的轻型高反射X射线镜，需要新的具有成本效益的技术和先进的材料。当前，非常有前途的材料是硅箔，其已经大规模商业化生产。我们专注于薄单晶硅箔的塑性变形，这是将箔精确热成型为3D形状所必需的。为了实现塑性变形，我们在1200至1400℃的温度下施加了强制塌落。使用Taylor Hobson接触轮廓仪测量箔的最终形状和表面质量，并用原子强迫显微镜检查。我们研究了温度，施加的塌陷力，热处理时间，晶体取向和炉内气氛对所形成的箔的形状和表面质量的影响。

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