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Slumping of Si wafers at high temperature

机译：在高温下Si晶片坍塌

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Space X-ray imaging telescopes have delivered unique observations that have been significantly contributing to many important discoveries of current astrophysics. For future telescopes with a larger collecting area and a better angular resolution, the limiting factor is their X-ray reflecting mirror array. Therefore, for a successful construction of future lightweight and highly reflecting X-ray mirrors, new cost-effective technologies and progressive materials are needed. Currently, the very promising materials are silicon foils which are commercially produced on a large scale. We focused on the plastic deformation of thin monocrystalline silicon foils, which was necessary for the precise thermal forming of the foils to 3D shapes. To achieve the plastic deformation, we applied forced slumping at temperatures from 1200 to 1400°C. The final shapes and the surface quality of the foils were measured using a Taylor Hobson contact profilometer and examined with an Atomic Forced Microscopy. We studied the effects of temperature, applied slumping force, heat-treatment time, crystal orientation, and furnace atmosphere on the shape and surface quality of the formed foils.
机译：空间X射线成像望远镜已经提供了独特的观察，这一直有助于对当前天体物理学的许多重要发现有影响。对于具有较大收集区域和更好的角度分辨率的未来望远镜，限制因子是它们的X射线反射镜阵列。因此，为了成功地建造未来的轻质和高度反射的X射线镜，需要新的经济高效的技术和渐进材料。目前，非常有希望的材料是在大规模生产的硅箔。我们专注于薄单晶硅箔的塑性变形，这对于箔的精确热成形为3D形状是必要的。为了实现塑性变形，我们在1200至1400°C的温度下施加强制坍塌。使用Taylor Hobson接触式轮廓仪测量箔的最终形状和表面质量，并用原子强制显微镜检查。我们研究了温度，施加的坍塌力，热处理时间，晶体取向和炉气氛对形成的箔的形状和表面质量的影响。

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