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Model-Assisted Placement of Sub-resolution Assist Features: Experimental Results

机译：辅助分辨率的模型辅助放置：实验结果

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Lithography models calibrated from experimental data have been used to determine the optimum insertion strategy of sub-resolution assist features in a 130 nm process. This work presents results for 3 different illumination types: Standard, QUASAR, and Annular. The calibrated models are used to classify every edge in the design based on its optical properties (in this case image-log-slope). This classification is used to determine the likelihood of an edge to print on target with the maximum image-log-slope. In other words, the method classifies design edges not in geometrically equivalent classes, but according to equivalent optical responses. After all the edges are classified, a rule table is generated for every process. This table describes the width and separation of the assist features based on a global cost function for each illumination type. The tables are later used to insert the assist features of various widths and separations using pre-defined priority strategies. After the bars have been inserted, OPC is applied to the main structures in the presence of the newly added assist features. Critical areas are tagged for increased fragmentation allowing certain areas to receive the maximum amount of correction and compensate for any proximity effects due to the sub-resolution assist features. The model-assisted solution is compared against a traditional rule-based solution, which was also derived experimentally. Both scenarios have model based OPC correction applied using simulation and experimental data. By comparing both cases it is possible to assess the advantages and disadvantages of both methods.
机译：从实验数据校准的光刻模型已用于确定130 nm工艺中亚分辨率辅助部件的最佳插入策略。这项工作介绍了3种不同照明类型的结果：标准，QUASAR和环形。校准后的模型用于根据设计的每个边缘的光学特性（在本例中为图像对数斜率）对它们进行分类。该分类用于确定边缘以最大图像对数斜率打印在目标上的可能性。换句话说，该方法不是按照几何等效的类别而是根据等效的光学响应将设计边缘分类。对所有边缘进行分类后，将为每个过程生成一个规则表。下表根据每种照明类型的全局成本函数描述了辅助功能部件的宽度和间距。这些表随后用于使用预定义的优先级策略插入各种宽度和间隔的辅助功能。在插入钢筋之后，在新添加辅助功能的情况下将OPC应用于主要结构。标记关键区域以增加碎片，使某些区域可以接受最大程度的校正并补偿由于次分辨率辅助功能而引起的任何邻近效应。将模型辅助解决方案与传统的基于规则的解决方案进行了比较，后者也是通过实验得出的。两种情况都使用基于模型的OPC校正，该校正使用仿真和实验数据进行。通过比较两种情况，可以评估两种方法的优缺点。

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