INTEGRATED MULTISCALE PROCESS SIMULATION OF DAMASCENE STRUCTURES

机译：大马士革结构的多尺度综合过程模拟

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This paper describes the integration of process simulations on several scales and for several process steps in the fabrication of a simple damascene structure. Starting with a blanket silicon dioxide substrate and a patterned mask, we perform simulations of plasma etching, barrier deposition, seed layer deposition, electrochemical deposition of copper using an additive containing bath, and chemical mechanical polishing. This virtual process sequence demonstrates the use of process simulation to study not just individual process steps, but process flows. CMP is used to focus the discussion of integrated multiscale process simulation (IMPS).

机译：本文描述了在简单的镶嵌结构的制造中在多个规模上以及在多个过程步骤中过程模拟的集成。从毯式二氧化硅衬底和带图案的掩模开始，我们进行了等离子体蚀刻，势垒沉积，籽晶层沉积，使用包含镀液的添加剂对铜进行电化学沉积以及化学机械抛光的模拟。该虚拟流程序列演示了如何使用流程仿真来研究单个流程步骤，而不是流程。 CMP用于集中讨论集成多尺度过程仿真（IMPS）。

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《Electrochemical Society Meeting and International Symposium on ULSI Process Integration III; 20030428-20030502; Paris; FR》|2003年|P.455-466|共12页
会议地点 Paris(FR);Paris(FR)
作者
M.O. Bloomfield; Yeon Ho Im; Jongwon Seok; Cyriaque P. Sukam; John A. Tichy; Timothy S. Cale;
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作者单位

Focus Center -New York, Rensselaer: Interconnections for Gigascale Integration, Rensselaer Polytechnic Institute, Troy, NY, 12180-3590;

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原文格式 PDF
正文语种 eng
中图分类大规模集成电路、超大规模集成电路;
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2. Processing nanostructured materials: the need to integrate experimental data with multiscale continuumon-continuum simulations [J] . Richard Alkire Journal of Electroanalytical Chemistry: An International Journal Devoted to All Aspects of Electrode Kinetics, Interfacial Structure, Properties of Electrolytes, Colloid and Biological Electrochemistry . 2003,第0期

机译：处理纳米结构材料：需要将实验数据与多尺度连续/非连续模拟进行集成
3. Integrated multiscale process simulation [J] . T. S. Cale, M. O. Bloomfield, D. F. Richards, Computational Materials Science . 2002,第1a4期

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4. Integrated Multiscale Process Simulation of Damescene Structures [C] . Max O.Bloomfield, Yeon Ho Im, Jongwon Seok, The Meeting of the Electrochemical Society . 2003

机译：DameScene结构的集成多尺度流程模拟
5. A framework for simulation-based integrated design of multiscale products and design processes. [D] . Panchal, Jitesh H. 2005

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6. Growth mechanisms of multiscale mound-like surface structures on titanium by femtosecond laser processing [O] . Edwin Peng, Ryan Bell, Craig A. Zuhlke, -1

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INTEGRATED MULTISCALE PROCESS SIMULATION OF DAMASCENE STRUCTURES

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