Abstract: Knowledge of the effects of fabrication using microlithography is essential when trying to reach a desired structure, i.e., when using proximity effect compensation. In this presentation, the particular case of diffractive microlenses, kinoforms, is studied. Normally, compensation for the proximity effect is done after the kinoform structure has been calculated with optical design methods. However, in this presentation it is shown that including the proximity effect already in the optical design methods leads to kinoforms whose optical quality is greatly improved. !4
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