首页> 外文会议>2019 Electron Devices Technology and Manufacturing Conference >Cell-by-Cell SCR ESD Protection Structures in 28nm CMOS
【24h】

Cell-by-Cell SCR ESD Protection Structures in 28nm CMOS

机译:28nm CMOS中的逐单元SCR ESD保护结构

获取原文
获取原文并翻译 | 示例

摘要

Silicon-Controlled Rectifier (SCR) electrostatic discharge (ESD) protection structures are widely used due to the high ESD robustness and area efficiency. Yet, conventional SCR ESD layout is still a design issue. This paper reports a novel cell-by-cell type SCR ESD structure where the ESD device is formed across the four edges of SCR cells aiming for higher layout efficiency and ESD discharging uniformity. This new cell-by-cell SCR ESD structure is validated in foundry 28nm CMOS, showing good ESD protection performance in measurement.
机译:由于高ESD鲁棒性和面积效率,可控硅整流器(SCR)静电放电(ESD)保护结构被广泛使用。然而,常规的SCR ESD布局仍然是设计问题。本文报道了一种新颖的逐电池型SCR ESD结构,其中ESD器件跨SCR电池的四个边缘形成,旨在提高布局效率和ESD放电均匀性。这种新的逐单元SCR ESD结构在铸造28nm CMOS中得到验证,在测量中显示出良好的ESD保护性能。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号