Performance of back-illuminated Tektronix CCDs in the extreme ultraviolet

机译：泰克背照式CCD在极紫外下的性能

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Abstract: The quantum efficiency (QE) and flat field characteristics of back-illuminated 1024 $MUL 1024 Tektronix CCDs have been measured in the extreme ultraviolet (EUV) between 44 and 1216 angstroms. These CCDs have been fabricated for the focal plane detector of the Extreme-ultraviolet Imaging Telescope (EIT) on the Solar and Heliospheric Observing spacecraft. The back-side surface of the EIT CCDs have been specially processed to enhance and stabilize the EUV QE. All requirements for QE are met by these devices, although a poorly understood variation of QE with temperature will complicate data analysis. !6s

机译：摘要：在44至1216埃的极紫外（EUV）中，已测量了背照式1024 $ MUL 1024 Tektronix CCD的量子效率（QE）和平坦场特性。这些CCD是为太阳和日球观测航天器上的极紫外成像望远镜（EIT）的焦平面探测器而制造的。 EIT CCD的背面经过特殊处理，以增强和稳定EUV QE。这些设备可以满足所有QE要求，尽管对QE随温度的变化知之甚少会使数据分析复杂化。 6秒

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《EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy IV》|1993年|p.252-257|共6页
会议地点 San Diego CA(US)
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J. Daniel Moses; Naval Research Lab.; Washington; DC; USA; Russell A. Howard; Naval Research Lab.; Washington; DC; USA; Dennis Wang; Naval Research Lab.; Washington; DC; USA; Richard C. Catura; Lockheed Palo Alto Research Lab.; Palo Alto; CA; USA; J.R. Le;
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正文语种 eng
中图分类无线电电子学、电信技术;
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3. Improved performance of a back-illuminated GaN-based metal-semiconductor-metal ultraviolet photodetector by in-situ modification of one-dimensional ZnO nanorods on its screw dislocations [J] . Chen Y. P., Zheng C. H., Hu L. Q., Journal of Alloys and Compounds: An Interdisciplinary Journal of Materials Science and Solid-state Chemistry and Physics . 2019,第期

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4. Performance of back-illuminated Tektronix CCDs in the extreme ultraviolet [C] . J. Daniel Moses, Russell A. Howard, Dennis Wang, Conference on EUV, x-ray, and gamma-ray instrumentation for astronomy . 1993

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5. Effects of radiation-induced carbon contamination on the printing performance of extreme ultraviolet masks. [D] . Fan, Yu-Jen. 2011

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Performance of back-illuminated Tektronix CCDs in the extreme ultraviolet

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