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Electromechanical characterization of screen-printed PZT thick films

机译:丝网印刷的PZT厚膜的机电特性

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摘要

Thick soft and hard-PZT films have been fabricated on different geometries of Alumina substrates using a screen-printing techni8que. Three mechanical characterization tests were set up to determine the Young's modulus of the films : dynamic, quasi-static and nanoindentation tests. A Young's modulus around 52+-7 GPa was calculated. The piezoelectric coefficient d_(31) was also investigated and is found to be close to -33pC/N. The fabricated films showed also good performances when used in damping control.
机译:已使用丝网印刷技术在氧化铝的不同几何形状上制作了厚的软PZT和硬PZT膜。建立了三个机械表征测试,以确定薄膜的杨氏模量:动态,准静态和纳米压痕测试。计算出约52 + -7 GPa的杨氏模量。还研究了压电系数d_(31),发现其接近-33pC / N。当用于阻尼控制时,制成的薄膜还显示出良好的性能。

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