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首页> 外文会议>Mechatronics, 2009. ICM 2009 >An electro-magneto-pneumatic spring for vibration control in semiconductor manufacturing
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An electro-magneto-pneumatic spring for vibration control in semiconductor manufacturing

机译：电磁气动弹簧，用于半导体制造中的振动控制

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An active vibration isolator was developed for semiconductor manufacturing machines using electro-magnetic (EM) levitation force. The spring is composed of a pneumatic elastic chamber and a magnetic actuator. The actuator has a coil and a permanent magnetic plate and is installed inside of the chamber. The mechanical and electronic parts are designed to operate under a weight of 2.0 tons. An air mount is constructed for the experiment with a stone surface plate, 4 active air springs, 4 gap sensors, a DSP controller, a linear power amp and vibration measurement systems. The impulse response of the air mount was monitored before and after the active control. The time duration was reduced by 77% in the impulse response. The maximum peak in frequency domain was reduced by 62%. We also found that the active system can avoid the resonance caused by the natural frequency of the passive system.
机译：使用电磁（EM）悬浮力为半导体制造机开发了一种主动隔振器。弹簧由气动弹性腔和磁性执行器组成。致动器具有线圈和永磁板，并安装在腔室内。机械和电子零件的设计重量为2.0吨。为该实验构建了一个空气支架，该支架具有一块石面板，4个活动空气弹簧，4个间隙传感器，一个DSP控制器，一个线性功率放大器和振动测量系统。在主动控制之前和之后，监视空气座的脉冲响应。脉冲响应的持续时间减少了77％。频域中的最大峰值降低了62％。我们还发现，主动系统可以避免由被动系统的固有频率引起的共振。

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