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An Electro-Magneto-Pneumatic Spring for Vibration Control in Semiconductor Manufacturing

机译：用于半导体制造中的振动控制电磁气动弹簧

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An active vibration isolator was developed for semiconductor manufacturing machines using electro-magnetic (EM) levitation force. The spring is composed of a pneumatic elastic chamber and a magnetic actuator. The actuator has a coil and a permanent magnetic plate and is installed inside of the chamber. The mechanical and electronic parts are designed to operate under a weight of 2.0 tons. An air mount is constructed for the experiment with a stone surface plate, 4 active air springs, 4 gap sensors, a DSP controller, a linear power amp and vibration measurement systems. The impulse response of the air mount was monitored before and after the active control. The time duration was reduced by 77% in the impulse response. The maximum peak in frequency domain was reduced by 62%. We also found that the active system can avoid the resonance caused by the natural frequency of the passive system.
机译：使用电磁（EM）悬浮力为半导体制造机开发了主动振动隔离器。弹簧由气动弹性室和磁性致动器组成。致动器具有线圈和永磁板，并且安装在腔室的内部。机械和电子部件设计成在2.0吨的重量下运行。为实验构造出具有石材表面板，4个有效气体弹簧，4间隙传感器，DSP控制器，线性功率放大器和振动测量系统的实验。在主动控制之前和之后监测空气支架的脉冲响应。脉冲响应中的时间持续时间减少了77％。频域中的最大峰减少62％。我们还发现，活性系统可以避免被动系统的固有频率引起的共振。

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