IMPROVED PERFORMANCES OF MC-SI SOLAR CELLS BY ISOTROPIC PLASMA TEXTURING

机译：通过各向同性等离子体纹理改善MC-Si太阳能电池的性能

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For a new approach in cell manufacturing of solar cells on thin (<150 μm) multi-crystalline (mc)-Si substrates, a new way of surface preparation, using plasma technology is proposed. Front side texturing can be realized in a newly developed plasma etching system, using both a SF6 and Cl2 chemistry. A proof of concept for plasma texturing mc-Si solar cells was evaluated by comparison to a classic wet acidic iso-texturing in a standard cell manufacturing process.

机译：对于薄（<150μm）多晶（MC）-SI基板上的太阳能电池细胞制造的新方法，提出了一种使用等离子体技术的新的表面制备方式。前侧纹理可以在新开发的等离子体蚀刻系统中实现，使用SF6和CL2化学。通过与标准电池制造过程中的经典湿酸性ISO纹理进行比较，评价血浆纹理MC-Si太阳能电池概念证据。

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《European photovoltaic solar energy conference》|2004年||共4页
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正文语种
中图分类太阳能电池;
关键词
Texturisation; Multi-Crystalline; Light Trapping;

机译：纹理;多晶硅;轻俘获;

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专利

1. Performance enhancement of mc-Si solar cells due to synergetic effect of plasma texturization and SiN_x:H AR coating [J] . Prasad B., Bhattacharya S., Saxena A.K., Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion . 2010,第8期

机译：等离子体织构化和SiN_x：H AR涂层的协同效应增强了mc-Si太阳能电池的性能
2. Constructing submicron textures on mc-Si solar cells via copper-catalyzed chemical etching [J] . Jiawei Zha, Ting Wang, Chengfeng Pan, Applied Physics Letters . 2017,第9期

机译：通过铜催化化学刻蚀在mc-Si太阳能电池上构建亚微米纹理
3. Fabrication and Characteristics of mc-Si Solar Cells with RIE-Textured Surface [J] . KWANG MOOK PARK, MYOUNG BOK LEE, JI HEE JUNG Molecular crystals and liquid crystals . 2012,第565期

机译：具有RIE结构化表面的mc-Si太阳能电池的制备和特性
4. IMPROVED PERFORMANCES OF MC-SI SOLAR CELLS BY ISOTROPIC PLASMA TEXTURING [C] . H.F.W. Dekkers, G. Agostinelli, D. Dehertoghe, European photovoltaic solar energy conference . 2004

机译：各向同性等离子体织构化改善了MC-SI太阳能电池的性能
5. Development of plasma cleaning and plasma enhanced close space sublimation hardware for improving CdS/CdTe solar cells. [D] . Swanson, Drew. 2012

机译：等离子体清洁和等离子体增强的近距离升华硬件的开发，用于改善CdS / CdTe太阳能电池。
6. High Performance of PEDOT:PSS-Si Solar Cells Based on Textured Surface with AgNWs Electrodes [O] . Xiangyu Jiang, Pengbo Zhang, Juan Zhang, 2018

机译：AgNWs电极在带纹理表面的PEDOT：PSS / n-Si太阳能电池的高性能
7. High-performance p-type multicrystalline silicon (mc-Si): Its characterization and projected performance in PERC solar cells [O] . Pietro P. Altermatt, Zhen Xiong, QiuXiang He, 2018

机译：高性能P型多晶硅硅（MC-SI）：其特征和投影性能在PERC太阳能电池中
8. Effect of Wafer Thickness on the Performance of mc-Si Solar Cells [R] . Tool, C. J. J., Burgers, A. R., Manshanden, P., 2001

机译：晶圆厚度对mc-si太阳电池性能的影响

IMPROVED PERFORMANCES OF MC-SI SOLAR CELLS BY ISOTROPIC PLASMA TEXTURING

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