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首页> 外文会议>Electronics Division Meeting of the Ceramic Society of Japan >Preparation of Piezoelectric Thick Film Actuator by Screen Printing and Wet Etching
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Preparation of Piezoelectric Thick Film Actuator by Screen Printing and Wet Etching

机译：用丝网印刷和湿法蚀刻制备压电厚膜致动器

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摘要

Piezoelectric actuators were prepared by the screen printing of piezoelectric thick films and the wet etching of Si substrates for the application of ink jet printer heads. The Pt bottom electrode was used as the vibration plate to obtain a large displacement. The layer structure and integration processes of the Pt bottom electrodes were investigated to be suited to the whole preparation process of the piezoelectric actuator. The displacement of the center of the actuator with 100 μmx mm was 0.03 μm at the applied voltage of 30 V and frequency of 4kHz.
机译：通过压电厚膜的丝网印刷制备压电致动器，以及用于施加喷墨打印机头的Si基板的湿法蚀刻。 PT底部电极用作振动板以获得大的位移。研究了PT底部电极的层结构和集成过程，适用于压电致动器的整个制备过程。致动器的中心的位移在100μmxmm的施加电压为30V的施加电压下为0.03μm，频率为4kHz。

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