Design and fabrication of a triaxial cutting force dynamometer based on MEMS technique

机译：基于MEMS技术的三轴切割力测力计的设计与制造

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This paper presents the design, fabrication and test of a triaxial cutting force dynamometer based on MEMS (micro-electro-mechanical system) technology. MEMS chip was utilized as transition element of the designed dynamometer because of its excellent sensitivity, favorable accuracy and high integration. In order to measure triaxial cutting forces, an innovative structure of two mutual-perpendicular octagonal rings was proposed and four MEMS chips were mounted on specified locations for sensing and generating force signals. Static calibration test illustrates that the dynamometer possesses favorable performances when compared to previous works; dynamic metal cutting experiment demonstrates that the dynamometer owns great potential for real time cutting force measurement in turning operation.

机译：本文介绍了基于MEMS（微机电系统）技术的三轴切割力测力计的设计，制造和测试。由于其出色的灵敏度，良好的精度和高集成，MEMS芯片用作设计测功机的过渡元件。为了测量三轴切割力，提出了一种互垂垂体八角环的创新结构，并安装了四个MEMS芯片，用于在指定位置上安装用于感测和产生力信号。静态校准测试说明了与以前的作品相比，测功机具有有利的性能;动态金属切割实验表明，测功机在转动操作中具有实时切割力测量的巨大潜力。

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《IEEE International Conference on Nano/Micro Engineered and Molecular Systems》|2015年||共4页
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作者
You Zhao; Yulong Zhao; Songbo Liang;
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中图分类特种结构材料;
关键词
MEMS; cutting force; dynamometer; favorable performances; triaxial;

机译：MEMS;切割力;测功机;有利的表演;三轴;

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1. Design and Fabrication of New Type of Dynamometer to Measure Radial Component of Cutting force and Experimental Investigation of Optimum Burnishing force in Roller Burnishing Process [J] . J. Naga Malleswara Rao, A. Chenna Kesava Reddy, P. V. Rama Rao Indian Journal of Science and Technology . 2010,第7期

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2. The Development of a Triaxial Cutting Force Sensor Based on a MEMS Strain Gauge [J] . You Zhao, Yulong Zhao, Xiaohui Ge Micromachines . 2018,第1期

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3. Development of a modular dynamometer for triaxial cutting force measurement in turning [J] . G. Totis, M. Sortino International Journal of Machine Tools & Manufacture: Design, research and application . 2011,第1期

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4. Design and fabrication of a triaxial cutting force dynamometer based on MEMS technique [C] . You Zhao, Yulong Zhao, Songbo Liang IEEE International Conference on Nano/Micro Engineered and Molecular Systems . 2015

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6. The Development of a Triaxial Cutting Force Sensor Based on a MEMS Strain Gauge [O] . You Zhao, Yulong Zhao, Xiaohui Ge 2018

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7. Design and fabrication of new type of dynamometer to measure radial component of cutting force and experimental investigation of optimum burnishing force in roller burnishing process [O] . J. Naga Malleswara Rao 2010

机译：新型测功机的设计与制造，测量滚筒抛光过程最佳抛光力的切削力径向分量及实验研究

Design and fabrication of a triaxial cutting force dynamometer based on MEMS technique

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