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首页> 外文会议>IEEE International Conference on Nano/Micro Engineered and Molecular Systems >A MEMS accelerometer for spindle monitoring system
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A MEMS accelerometer for spindle monitoring system

机译：用于主轴监控系统的MEMS加速度计

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摘要

Vibration acceleration detection of spindle monitoring requires that the accelerometer has an adequate measurement sensitivity and response frequency above the interested range. This paper aims at design a kind of micro-electro-mechanical system (MEMS) accelerometer that can be used in the spindle component's vibration detection. To measure the vibration acceleration of the high speed spindle accurately, the accelerometer uses the cantilever beam-membrane (CBM) structure as sensing structure. In order to verify that the design of the sensor can be used in the spindle monitoring system, the vibration signal of spindle monitoring system were tested at different rotational speed. Experimental results show that the developed sensor is able to accurately identify the vibration signals in the monitoring system.
机译：主轴监控的振动加速度检测要求加速度计具有足够的测量灵敏度和高于目标范围的响应频率。本文旨在设计一种可用于主轴部件振动检测的微机电系统（MEMS）加速度计。为了准确测量高速主轴的振动加速度，加速度计使用悬臂梁膜（CBM）结构作为传感结构。为了验证传感器的设计可用于主轴监控系统，在不同转速下测试了主轴监控系统的振动信号。实验结果表明，开发的传感器能​​够准确识别监控系统中的振动信号。

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