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首页> 外文会议>IEEE International Conference on Nano/Micro Engineered and Molecular Systems >Honeycomb-patterned PDMS membrane based on nanosphere lithography
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Honeycomb-patterned PDMS membrane based on nanosphere lithography

机译：基于纳米球光刻的蜂窝图案PDMS膜

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This paper reports a single-step and cost-effective method to fabricate ultrathin Poly(dimethylsiloxane) (PDMS) membrane with honeycomb-like nanostructure on silicon substrate. The method is based on the template prepared by colloidal nanoparticles self-assembly. The thickness and nanostructure of the membrane are both determined by the size and surface morphology of two dimensional colloidal nanoparticles monolayer. Surface analysis by atomic force microscopy (AFM) is carried out to investigate the mechanism for the formation of the membrane. The peeling process is regarded as the key process contributing to the formation of PDMS membrane while the unrecoverable mechanical failure is regarded as the key factor. Fabrication parameters in baking process are systematically analyzed to discover the nature character in hydrophobicity of this membrane. This fabrication method and mechanism also potentially contribute to the preparation of membrane of other materials.
机译：本文报道了一种单步和经济效益的方法，用于用硅衬底用蜂窝状纳米结构制造超薄聚（二甲基硅氧烷）（PDMS）膜。该方法基于胶体纳米颗粒自组装制备的模板。膜的厚度和纳米结构均由二维胶体纳米颗粒单层的尺寸和表面形态决定。进行原子力显微镜（AFM）的表面分析，以研究形成膜的机制。剥离过程被认为是有助于形成PDMS膜的关键过程，而不可恢复的机械故障被认为是关键因素。系统地分析烘焙过程中的制造参数以发现该膜的疏水性的性质。这种制造方法和机制也可能有助于制备其他材料的膜。

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