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Design and simulation of a MEMS based dual axis capacitive accelerometer

机译：基于MEMS的双轴电容计的设计与仿真

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Micro Electro Mechanical Systems (MEMS) based multi axis accelerometers are embedded in many modern technological applications. These sensors are widely used in smart electronics, bio-medical uses, automobiles and aeronautics. The work followed herewith is focused on designing of a 2 degree of freedom (D.O.F) MEMS based capacitive accelerometer which can be used with such vibration detection modules. The 2mm × 2mm × 100μm sensor has a working range of up to ±16g and a failure limit of 20g The movement of a proof mass which is 74.5% of the sensor area is used to generate amplified voltage signals based on the theory of capacitance using a series of capacitive comb elements mounted on the perimeter of the sensor. Process simplification is achieved with the use of a single Silicon-on-Insulation (SOI) wafer and minimum masking material. The paper contains details on structural and motion analysis performed on the design and also contains techniques which can be used for the fabrication of the sensor and electrical contacts needed for the successful implementation of the sensor into electrical circuitry.
机译：基于微轴加速度计的微型电力机械系统（MEMS）嵌入了许多现代技术应用中。这些传感器广泛用于智能电子设备，生物医疗用途，汽车和航空。此处的作品专注于设计一种基于2个电容式的自由度（D.O.F）MEMS，其可与这种振动检测模块一起使用。 2mm×2mm×100μm的传感器的工作范围高达±16g，并且验样质量的运动失效限制为74.5％的传感器区域，用于基于电容理论使用的基于电容理论一系列安装在传感器周边上的电容梳形元件。使用单个绝缘（SOI）晶片和最小掩模材料来实现工艺简化。本文包含关于设计的结构和运动分析的细节，并且还包含可用于制造传感器和在电路中成功实现所需的传感器和电触点的技术。

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