The design of two-zone heater for a MOCVD vacuum reactor

机译：MOCVD真空反应器的两区加热器设计

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Numerical analysis provides a way to simulate a high temperature system so that a design of heat source can be cost-effective. This research is in design of two-zone heater for a MOCVD vacuum rector. It makes the temperature deviation on wafer reduced to be ??2% from the 10% in single-zone heater. By the design of such a heat source, the temperature uniformity can be improved and applied to the practical process.

机译：数值分析提供了一种模拟高温系统的方法，从而使热源的设计具有成本效益。这项研究是在用于MOCVD真空整流器的两区加热器的设计中。它使晶片上的温度偏差从单区加热器中的10％降低到了2％。通过这种热源的设计，可以改善温度均匀性并将其应用于实际过程。

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《China Semiconductor Technology International Conference》|2016年|1-4|共4页
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Cheng-Pin Chang; Chih-Kai Hu; Hsien-Chih Chiu; Tomi T. Li;
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4. The design of two-zone heater for a MOCVD vacuum reactor [C] . Cheng-Pin Chang, Chih-Kai Hu, Hsien-Chih Chiu, China Semiconductor Technology International Conference . 2016

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6. Monolithically Integrated Diffused Silicon Two-Zone Heaters for Silicon-Pyrex Glass Microreactors for Production of Nanoparticles: Heat Exchange Aspects [O] . Milena Rašljić Rafajilović, Katarina Radulović, Milče M. Smiljanić, 2020

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The design of two-zone heater for a MOCVD vacuum reactor

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