A pump/valve modular system capable of micro-dosing small aliquots of solutions in the micro- nano- picoliter range is presented. The system consists of two micro machined buckled membranes actuated pneumatically to function as a bi-stable diaphragm mechanism that opens and closes a conduit and actively uptakes and delivers a specified volume of fluid. The module is micro fabricated on a silicon wafer that confers to the system broad substance compatibility and makes possible miniaturization to a few millimeters. A titanium nickel actuator could be used to electrically actuate the pump/valve. The large elastic modulus of the silicon oxide membrane allow operation at pressures from a few psi to 200 psi. Prototype devices have been constructed that deliver 1 to 10 nanoliters per stroke.
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