• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>International MATADOR Conference >Laser resonant excitation of precursor molecules in chemical vapor deposition of diamond thin films and crystals
【24h】

Laser resonant excitation of precursor molecules in chemical vapor deposition of diamond thin films and crystals

机译：金刚石薄膜和晶体化学气相沉积前体分子的激光共振激发

获取原文
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Fast growth of diamond thin films and crystals in open air was achieved by combustion synthesis with resonant laser energy coupling. A pre-mixed C_2H_4/C_2H_2/O_2 gas was used as precursors for chemical vapor deposition of diamond. Through the resonant excitation of the CH_2 wagging mode of the ethylene (C_2H_4) molecules using a CO_2 laser tuned at 10.532 μm, high-quality diamond thin films and crystals were grown on various substrates with a high growth rate. The effects of the resonant laser energy coupling were investigated using optical emission spectroscopy and mass spectroscopy. Excitations of precursor molecules by different laser powers were studied. The density of the incident laser power was adjusted to modify diamond crystal orientation, optimize diamond quality, and achieve high-efficiency laser energy coupling. The wavelength-tunable CO_2 laser steers the chemical reactions and promotes proportion of intermediate oxide species, which results in preferential growth of (100)-oriented diamond. The wavelength-tunable CO_2 laser was also used to resonantly excite the vibration modes of ammonia molecules to synthesize N-doped diamond. The laser wavelength was tuned to match frequencies of the NH wagging mode of the ammonia molecules. Vibrational excitation of the ammonia molecules promotes nitrogen concentration in the deposited diamond films. This study opens up a new avenue for controlled chemical vapor deposition of crystals through resonant vibrational excitations to steer surface chemistry.
机译：通过燃烧合成具​​有谐振激光能量耦合，实现了燃烧中的金刚石薄膜和晶体的快速生长。将预混合的C_2H_4 / C_2H_2 / O_2气体用作金刚石的化学气相沉积的前体。通过使用CO_2激光调谐在10.532μm的CO_2激光器的CH_2摇杆模式的共振激发，在具有高生长速率的各种基板上生长高质量的金刚石薄膜和晶体。使用光发射光谱和质谱研究了谐振激光能量耦合的影响。研究了不同激光功率的前体分子激发。调整入射激光功率的密度以改变金刚石晶体取向，优化钻石质量，实现高效激光能量耦合。波长可调CO_2激光使化学反应引导并促进中间氧化物物质的比例，这导致（100）型金刚石的优先生长。波长可调CO_2激光器也用于共振激发氨分子的振动模式，以合成N掺杂的金刚石。激光波长被调节以匹配氨分子的NH摇动模式的频率。氨分子的振动激发促进沉积的金刚石薄膜中的氮浓度。本研究通过谐振振动激发为晶体的控制化学气相沉积的新途径，以引导表面化学。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号