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Electrochemical etching process and modeling its uniformity in flow feactor

机译:电化学蚀刻过程和模拟其流量故障器的均匀性

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Electrochemical behavior of 301 and 316L stainless steel in neutral solution in conditions of electrochemical etching governed by passivation metal surface with salt films. Mathematical models of electrochemical etching process uniformity was created and compared with the experiment. The most significant factors which influent on the uniformity are pattern line wide, cell vltage and metal thickness.
机译:用盐膜钝化金属表面管辖的电化学蚀刻条件301和316L不锈钢的电化学行为。与实验相比,创建了电化学蚀刻工艺均匀性的数学模型。影响均匀性的最重要因素是图案线宽,细胞vltage和金属厚度。

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