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首页> 外文会议>Conference on design, fabrication, and characterization of photonic devices >Blazed-grating couplers in unibond SOI
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Blazed-grating couplers in unibond SOI

机译：Unibond Soi的闪光灯耦合器

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Grating couplers can be more efficient than end-fire coupling, in coupling light into a thin film waveguide. The aim of this work is to fabricate a low cost, highly efficient silicon waveguide grating coupler which is to be use data the telecommunication wavelength of 1.3 $mu@m. Silicon-on-insulator (SOI) is chosen for fabricating the gratings as it is low cost using the exiting silicon technology. Unibond wafers were used because they offer flexibility in the choice of the thickness' of both the silicon film and the buried oxide layer, and they have low optical waveguide loss. The wafers used in this work have a Si film thickness of 1.14 $mu@m and a SiO$-2$/ buried layer thickness of 0.67 $mu@m. Gratings that have asymmetrical profiles, such as blazed gratings are known to have higher directionality than the symmetrical rectangular gratings, and hence a higher output efficiency. Using perturbation theory, Si blazed gratings with an optimum grating height were predicted to have a maximum output efficiency of the order of 90 percent towards the substrate. The design and fabrication of the blazed gratings will be discussed in this paper.
机译：光栅耦合器可以比端射耦合更有效的，在将光耦合到薄膜波导。这个工作的目的是制造一种低成本，高效率的硅波导光栅耦合器，其是要使用的数据的$ 1.3亩@米电信波长。硅绝缘体（SOI）被选择用于制造光栅，因为它是低成本利用离开硅技术。 Unibond晶片使用，因为它们在硅膜和掩埋氧化物层两者的厚度的选择提供了灵活性，并且它们具有低的光学波导损失。在这项工作中所用的晶片具有的$ 1.14亩@米和SiO $ -2 0.67 $亩@ M $ /埋层厚度的硅膜厚度。具有非对称轮廓的光栅，例如闪耀光栅已知具有更高的方向性比所述对称矩形光栅，并且因此更高的输出效率。使用微扰理论，硅闪耀光栅具有最佳光栅高度被预测为具有朝向基底90％的量级的最大的输出效率。闪耀光栅的设计和制造将在本文中讨论。

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