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Research Progresses on High Efficiency Amorphous and Microcrystalline Silicon-Based Thin Film Solar Cells

机译：高效非晶和微晶硅基薄膜太阳能电池的研究进展

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This paper reviews our research progresses of hydrogenated amorphous silicon (a-Si:H) and microcrystalline (μc-Si:H) based thin film solar cells. It coves the three areas of high efficiency, low cost process, and large-area proto-type multi-chamber system design and solar module deposition. With an innovative VHF power profiling technique, we have effectively controlled the crystalline evolution and made uniform μc-Si:H materials along the growth direction, which was used as the intrinsic layers of pin solar cells. We attained a 9.36% efficiency with a μc-Si:H single-junction cell structure. We have successfully resolved the cross-contamination issue in a single-chamber system and demonstrated the feasibility of using single-chamber process for manufacturing. We designed and built a large-area multi-chamber VHF system, which is used for depositing a-Si:H/ue-Si:H micromorph tandem modules on 0.79-m~2 glass substrates. Preliminary module efficiency has exceeded 8%.
机译：本文综述了我们的研究进展的氢化非晶硅（A-Si：H）和基于微晶（μC-Si：H）的薄膜太阳能电池。它通过高效率，低成本过程和大面积原型多室系统设计和太阳能模块沉积的三个领域。通过创新的VHF功率分析技术，我们有效地控制了晶体的进化并沿生长方向制造均匀的μC-Si：H材料，用作销太阳能电池的内在层。我们效率为9.36％，具有μC-Si：H单结电池结构。我们已成功解决了单室系统中的交叉污染问题，并展示了使用单室制造过程的可行性。我们设计并制造了一个大面积多室VHF系统，用于在0.79-m〜2玻璃基板上沉积A-Si：H Micromorph Tandem模块。初步模块效率超过了8％。

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