The deflection and frequency analysis of the inhomogeneous silicon cantilever beam for microrelay

机译：微孔中不均匀硅悬臂梁的偏转和频率分析

获取原文

页面导航

摘要
著录项
相似文献
相关主题

摘要

The inhomogeneous silicon cantilever beam is used to the design of micro-relay, compared the properties with the inhomogeneous and homogeneous cantilever beam, we get the results as: the inhomogeneous cantilever beam has a lower drive power than that of homogeneous; when the same drive power, the pressure of the touch point of the inhomogeneous cantilever is greater than that of homogeneous, but the frequency of the inhomogeneous cantilever is lower than that of homogeneous. In some special cases, if the frequency and dynamic response does not require high precision, the inhomogeneous cantilever beam is a good choice; it can obtain a low driver power and high pressure on the touch point for the micro-relay. The deflection of and the frequency of the analysis of the inhomogeneous silicon cantilever beam for micro-relay is put forward in the paper.

机译：非均匀硅悬臂梁用于设计微继电器，与不均匀且均匀的悬臂梁进行比较，得到结果，因为：不均匀的悬臂梁具有比均匀的更低的驱动力。当相同的驱动功率时，非均匀悬臂的触摸点的压力大于均匀的压力，但不均匀悬臂的频率低于均匀的频率。在一些特殊情况下，如果频率和动态响应不需要高精度，则不均匀的悬臂梁是一个不错的选择;它可以在微继电器的触摸点获得低驾驶员电源和高压。纸张上提出了用于微继电器的非均匀硅悬臂梁分析的偏转和频率。

著录项

来源
《Conference on MEMS/MOEMS Technologies and Applications》|2004年||共7页
会议地点
作者
Hong Huinan; Hu Guoqing; Chen Guangwen; Liu Wenyan;
展开▼
作者单位

展开▼
会议组织
原文格式 PDF
正文语种
中图分类微电子学、集成电路（IC）;
关键词
micro-relay; homogeneous; inhomogeneous; deflection; silicon cantilever beam;

机译：微继电器;均匀;不均匀;偏转;硅悬臂梁;

相似文献

外文文献
中文文献
专利

1. MEASUREMENT OF THE MODAL SHAPES OF INHOMOGENEOUS CANTILEVERS USING OPTICAL BEAM DEFLECTION [J] . Jenkins DFL., Clegg WW., Bakush MM., Measurement Science & Technology . 1995,第2期

机译：利用光学光束偏转测量不均匀悬臂梁的模态形状
2. LARGE DEFLECTION ANALYSIS OF CANTILEVER BEAMS WITH AN OPENING [J] . M.A. RAHMAN, M.S. RAHMAN, A.H.M. ZAFRUL HOSSAIN Applied Mechanics and Engineering . 2007,第1期

机译：开孔悬臂梁的大挠度分析
3. Exact large deflection analysis of nonprismatic cantilever beams of nonlinear bimodulus material subjected to tip moment [J] . Shatnawi AS, Al-Sadder S Journal of Reinforced Plastics and Composites . 2007,第12期

机译：尖矩作用下非线性双模材料非棱镜悬臂梁的精确大挠度分析
4. The deflection and frequency analysis of the inhomogeneous silicon cantilever beam for microrelay [C] . Hong Huinan, Hu Guoqing, Chen Guangwen, Conference on MEMS/MOEMS Technologies and Applications . 2004

机译：微孔中不均匀硅悬臂梁的偏转和频率分析
5. Computational analysis of the effect of surface roughness on the deflection of gold coated silicon micro-cantilevers due to molecular adsorption . [D] . Hayden, Victor. 2012

机译：分子吸附引起的表面粗糙度对镀金硅微悬臂梁挠度影响的计算分析。
6. Real-Time Deflection Monitoring for Milling of a Thin-Walled Workpiece by Using PVDF Thin-Film Sensors with a Cantilevered Beam as a Case Study [O] . Ming Luo, Dongsheng Liu, Huan Luo 2016

机译：以带有悬臂梁的PVDF薄膜传感器为例对薄壁工件的铣削进行实时变形监控
7. Frequency-modulation atomic force microscopy at high cantilever resonance frequencies using the heterodyne optical beam deflection method [O] . Fukuma T, Kimura K, Kobayashi K, 2005

机译：外差光束偏转法在高悬臂共振频率下的调频原子力显微镜
8. Characterization of the Mechanisms Producing Bending Moments in Polysilicon Micro-Cantilever Beams by Interferometric Deflection Measurements [R] . Lober, T. A., Huang, J., Schmidt, M. A., 1988

机译：用干涉偏转测量法表征多晶硅微悬臂梁产生弯矩的机理

The deflection and frequency analysis of the inhomogeneous silicon cantilever beam for microrelay

摘要

著录项

相似文献

相关主题

期刊订阅