MEASUREMENT OF THE MODAL SHAPES OF INHOMOGENEOUS CANTILEVERS USING OPTICAL BEAM DEFLECTION

Jenkins DFL.; Clegg WW.; Bakush MM.; Cunningham MJ.

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MEASUREMENT OF THE MODAL SHAPES OF INHOMOGENEOUS CANTILEVERS USING OPTICAL BEAM DEFLECTION

机译：利用光学光束偏转测量不均匀悬臂梁的模态形状

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The study of free vibrations of systems such as simple cantilevers has been mainly concerned with the determination of the eigenvalues (frequencies) and eigenfunctions (modal shapes). A technique has been developed, using optical beam deflection, to measure the modal shape of a cantilever non-invasively at each modal frequency. A knowledge of the modal shapes of very small cantilevers incorporating suitable actuators is important in the application of active vibration control to micromechanical structures. [References: 12]

机译：对诸如简单悬臂之类的系统的自由振动的研究主要涉及特征值（频率）和特征函数（模态形状）的确定。已经开发出一种利用光束偏转来无创地在每个模态频率下测量悬臂的模态形状的技术。结合合适致动器的非常小的悬臂的模态形状的知识对于将主动振动控制应用于微机械结构非常重要。 [参考：12]

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《Measurement Science & Technology》 |1995年第2期|共7页
作者
Jenkins DFL.; Clegg WW.; Bakush MM.; Cunningham MJ.;
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正文语种 eng
中图分类仪器、仪表;
关键词
Force microscope; Displacement;

机译：力显微镜;位移;

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专利

1. MEASUREMENT OF THE MODAL SHAPES OF INHOMOGENEOUS CANTILEVERS USING OPTICAL BEAM DEFLECTION [J] . Jenkins DFL., Clegg WW., Bakush MM., Measurement Science & Technology . 1995,第2期

机译：利用光学光束偏转测量不均匀悬臂梁的模态形状
2. The influence of stiffness of implant-abutment connection on load-deflection ratios of a screw-retained stiff cantilever beam: 3-D measurements in vitro [J] . CasselB., LundgrenD., KarlssonD. Clinical oral implants research . 2013,第11期

机译：种植体-基台连接的刚度对螺钉固定的刚性悬臂梁的载荷-挠度比的影响：体外3-D测量
3. Deflections of an implant-supported cantilever beam subjected to vertically directed loads: in vitro measurements in three dimensions using an optoelectronic method. I. Experimental set-up [J] . Bjorn Cassel, Dan Lundgren, Dan Karlsson Clinical oral implants research . 2011,第3期

机译：承受垂直方向载荷的植入物支撑的悬臂梁的挠度：使用光电方法进行的三维三维测量。一，实验装置
4. The Deflection and Frequency Analysis of the Inhomogeneous Silicon Cantilever Beam for Micro-relay [C] . Hong Huinan, Hu Guoqing, Chen Guangwen, MEMS/MOEMS Technologies and Applications II . 2004

机译：微继电器非均质硅悬臂梁的挠度和频率分析
5. On the modal effective nonlinearity of a class of tapered-cantilever beams. [D] . da Silva, Clodoaldo Jose. 2016

机译：一类锥形悬臂梁的模态有效非线性。
6. Piezoresistive AFM cantilevers surpassing standard optical beam deflection in low noise topography imaging [O] . Maja Dukic, Jonathan D. Adams, Georg E. Fantner -1

机译：低噪声地形成像中压阻AFM悬臂超过标准光束偏转
7. A theoretical comparison between interferometric and optical beam deflection technique for the measurement of cantilever displacement in AFM [O] . Putman, Constant A.J., Putman, C.A.J., de Grooth, B.G., 1992

机译：干涉法和光束偏转技术在原子力显微镜中测量悬臂位移的理论比较
8. Characterization of the Mechanisms Producing Bending Moments in Polysilicon Micro-Cantilever Beams by Interferometric Deflection Measurements [R] . Lober, T. A., Huang, J., Schmidt, M. A., 1988

机译：用干涉偏转测量法表征多晶硅微悬臂梁产生弯矩的机理

MEASUREMENT OF THE MODAL SHAPES OF INHOMOGENEOUS CANTILEVERS USING OPTICAL BEAM DEFLECTION

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