Performance of a high-stroke segmented MEMS deformable-mirror technology

机译：高冲程分段MEMS可变形镜技术的性能

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This paper presents a MEMS DM that is a hybrid of surface micromachining and bulk micromachining. The combination of fabrication techniques resulted in a DM that has demonstrated 7.6 μm stroke at 125 V, 98.6% fill factor, and excellent optical quality of better than 16 nm rms after packaging. Preliminary cyclic testing over 110 hours and 107 cycles showed no noticeable changes to the actuator positions after cycling

机译：本文呈现了一个MEMS DM，它是表面微机械线的混合动力和散装微机器。制造技术的组合导致DM，其在包装后125V，98.6％填充因子，优异的光学质量优于16nm rms的优异光学质量。 110小时内的初步循环测试和107个循环显示在循环后的执行器位置没有明显的变化

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来源
《Conference on MEMS/MOEMS Components and Their Applications》|2006年||共10页
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Michael A. Helmbrecht; Thor Juneau; Matthew Hart; Nathan Doble;
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中图分类微电子学、集成电路（IC）;
关键词
Deformable Mirror; MEMS; Adaptiv Optics; Spatial Light Modualtor; Retinal Imaging;

机译：可变形镜;MEME;自适应光学;空间光调制器;视网膜成像;

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4. Performance of a high-stroke, segmented MEMS deformable-mirror technology [C] . Michael A. Helmbrecht, Thor Juneau, Matthew Hart, MEMS/MOEMS Components and Their Applications III . 2006

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机译：高冲程，高阶mEms可变形反射镜

Performance of a high-stroke segmented MEMS deformable-mirror technology

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