Performance of a high-stroke, segmented MEMS deformable-mirror technology

机译：高行程，分段MEMS可变形镜技术的性能

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This paper presents a MEMS DM that is a hybrid of surface micromachining and bulk micromachining. The combination of fabrication techniques resulted in a DM that has demonstrated 7.6 μm stroke at 125 V, 98.6% fill factor, and excellent optical quality of better than 16 nm rms after packaging. Preliminary cyclic testing over 110 hours and 10~7 cycles showed no noticeable changes to the actuator positions after cycling.

机译：本文提出了一种MEMS DM，它是表面微加工和体微加工的混合体。结合制造技术，制造出的DM在125 V下的冲程为7.6μm，填充系数为98.6％，封装后的光学质量优于16 nm rms。经过110小时和10〜7个循环的初步循环测试表明，循环后执行器位置没有明显变化。

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来源
《MEMS/MOEMS Components and Their Applications III》|2006年|P.61130L.1-61130L.10|共10页
会议地点 San JoseCA(US)
作者
Michael A. Helmbrecht; Thor Juneau; Matthew Hart; Nathan Doble;
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作者单位

Iris AO, Inc., 2680 Bancroft Way, Berkeley, CA, 94706, USA;

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会议组织
原文格式 PDF
正文语种 eng
中图分类微电子学、集成电路（IC）;
关键词
deformable mirror; MEMS; adaptive optics; spatial light modulator; retinal imaging;

机译：变形镜; MEMS;自适应光学;空间光调制器;视网膜成像;

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Performance of a high-stroke, segmented MEMS deformable-mirror technology

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