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Active and Semi-Active Vibration Control of Ultrasonic Bonding Transducers - (PPT)

机译:超声波键合换能器的主动和半主动振动控制 - (PPT)

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摘要

1. "Parasitic eigenmodes" may disturb bonding process 2. A novel prototype transducer with additional piezoelectric actuators was developed 3. The piezoelectric shunt damping technique with a passive LR-network was studied 4. Measurements where carried out with optimal tuned network 5. A significant reduction in vibration amplitudes of parasitic mode was obtained 150.
机译:1.“寄生尖端”可以干扰粘合过程2.开发了具有附加压电致动器的新型原型换能器3.研究了具有无源LR网络的压电分流阻尼技术4.测量,其中具有最佳调谐网络5.A获得了寄生模式的显着降低了寄生模式的振缩幅度。

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