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Advanced Looping in Copper Wire Bonding

机译:铜线键合先进的环路

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Over the past 30 years, wire-bonding technology has been advancing using gold wire in the interconnection process. With the current market trend demanding lower packaging cost, copper wire bonding is rapidly picking up momentum as the semiconductor interconnection material versus gold wire. The price of copper material is up to 90% cheaper than gold. In addition to better electrical conductivity and stiffer mechanical properties, another advantage of copper is that its intermetallic growth at the Cu-Al interface is significantly slower than the Au-Al interface at comparable temperatures. This results in greater reliability at elevated temperatures. Copper is also known to have higher thermal conductivity than gold by 25% resulting in larger grain structures at the region adjacent to the free air ball after an electric flame-off (EFO) fire. The more efficient thermal conductivity of copper wire allows better heat dissipation and produces a shorter heat-affected zone (HAZ) in the wire during free air ball formation. The shorter HAZ, as well as the stiffer nature of copper wires, has many implications to its wire looping capability, especially in very low loop height formation. Today, market demand for copper wire bonding is not only for low pin count lead frame packages but has expanded to multi-tiers, very low loop height, stacked die, and die-to-die stand-off stitch bond (SSB) interconnect applications. Thus, development efforts in copper loop shape capability have been growing. Understanding copper wire performance in achieving different loop shapes will offer increased flexibility of its implementation in various packages. This paper will discuss the unique challenges in copper wire looping formation in meeting the same stringent loop height and wire consistency requirements as gold wire.
机译:在过去30年中,引线键合技术一直在互连过程中使用金线推进。随着当前市场趋势要求较低的封装成本,铜线键合正在快速拾取作为半导体互连材料与金线的动量。铜材料的价格比黄金便宜得多90%。除了更好的导电性和更硬的机械性能之外,铜的另一个优点是Cu-Al界面处的金属间生长明显慢于可比温度下的Au-Al界面。这导致高温下的可靠性更高。还已知铜的导热率高于金25%,导致在电火焰(EFO)火灾之后与自由空气球相邻的区域处的较大晶粒结构。铜线的较高导热率允许更好的散热,并在自由空气球形成期间在线中产生较短的热影响区域(HAZ)。较短的HAZ以及铜线的更硬性,对其线环路能力具有许多影响,特别是在非常低的环高度形成中。如今,市场对铜线键合的需求不仅适用于低销钉数框架框架,而且已经扩展到多层,非常低的环高度,堆叠管芯和管芯脱扣缝合键(SSB)互连应用。因此,铜环形状能力的开发努力越来越大。了解实现不同环形形状的铜线性能将提供在各种封装中实现其实现的灵活性。本文将讨论铜线环路形成中的独特挑战,以满足与金线相同的严格环形高度和电线稠度要求。

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