Study on chemical mechanical ultra precision process technology of Aluminum Interconnected Line for ULSI

机译：Ulsi铝合金互联线路化学机械超精密工艺技术研究

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The chemical mechanical polishing ultra precision process technology mechanism of Aluminum Interconnected Line for ULSI was analyzed according the physical and chemical properties of Aluminum. In order to meet the request of environmental protection and reducing ion staining, the alkaline slurry was adopted. The selection reason of pH value regulator and surfactant was discussed, and their actions during polishing were analyzed. According to the experimental results and optimal technological parameters, the higher removal rate and lower surface roughness were gotten, which were 390 nm/min and 0.47 nm respectively.

机译：铝的物理和化学性质分析了Ulsi铝合金互联线的化学机械抛光超精密工艺技术机制。为了满足环境保护的要求和还原离子染色，采用碱性浆料。讨论了pH值调节剂和表面活性剂的选择原因，分析了抛光过程中的作用。根据实验结果和最佳技术参数，得到了较高的去除率和下表面粗糙度，分别为390nm / min和0.47nm。

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《International Conference on Electronic and Mechanical Engineering and Information Technology》|2013年||共4页
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作者
Niu Xin Huan; Wang Juan; Sun ming; Tan Baimei; Gao Baohong;
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原文格式 PDF
正文语种
中图分类 TP39-53;
关键词
ULSI; Aluminum interconnection line; Chemical mechanical polishing;

机译：Ulsi;铝互连线;化学机械抛光;

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Study on chemical mechanical ultra precision process technology of Aluminum Interconnected Line for ULSI

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