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首页> 外文会议>Conference on MEMS, MOEMS and Micromachining >Tunable InP/air MOEMS filter with record breaking selectivity
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Tunable InP/air MOEMS filter with record breaking selectivity

机译：可调谐INP / AIR MOEMS过滤器，具有记录断开选择性

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摘要

We describe the design and fabrication of novel Fabry-Perot tunable filters based on a deformable structure composed of surface micromachined indium phosphide (InP) / Air Distributed Bragg Reflectors (DBRs). As compared to conventional designs, superior spectral selectivity has been achieved by displacing the resonant cavity into the high index material (InP) rather than in air. This configuration is expected to reduce significantly the lateral losses of the cavity. The filters feature also a novel doping structure for bi-directional electrostatic actuation. We present simulations and experimental results that demonstrate the effectiveness of this high index cavity concept for improving the selectivity of small dimension tunable MOEMS filters. The devices are fabricated using a multiple InP-air-gap MOEMS technology based on the sacrificial etching of an InP / InGaAs stack A spectral linewidth better than 0.15 nm over a tuning range of 40 nm is experimentally demonstrated. Design improvements for doubling the tuning range are also proposed.
机译：我们基于由表面微机械型铟磷化铟（InP）/空气分布式布拉格反射器（DBR）组成的可变形结构的新型法布里 - 珀罗可调谐过滤器的设计和制造。与传统设计相比，通过将共振腔（INP）而不是空气中的谐振腔来实现卓越的光谱选择性。预计该配置将显着降低腔的横向损耗。过滤器还具有用于双向静电驱动的新型掺杂结构。我们呈现模拟和实验结果，证明了这种高索引腔概念的有效性，用于改善小尺寸可调MoEms过滤器的选择性。使用基于基于INP / InGaAs的牺牲蚀刻的多个InP-Air-Gap MoEMS技术制造，该叠叠的光谱线宽在40nm的调谐范围内优于0.15nm。还提出了对调谐范围加倍的设计改进。

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