• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>MEMS, MOEMS, and Micromachining II >Tunable InP/air MOEMS filter with record breaking selectivity
【24h】

Tunable InP/air MOEMS filter with record breaking selectivity

机译：可调节的InP / air MOEMS过滤器，具有创纪录的选择性

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

We describe the design and fabrication of novel Fabry-Perot tunable filters based on a deformable structure composed of surface micromachined indium phosphide (InP) / Air Distributed Bragg Reflectors (DBRs). As compared to conventional designs, superior spectral selectivity has been achieved by displacing the resonant cavity into the high index material (InP) rather than in air. This configuration is expected to reduce significantly the lateral losses of the cavity. The filters feature also a novel doping structure for bi-directional electrostatic actuation. We present simulations and experimental results that demonstrate the effectiveness of this high index cavity concept for improving the selectivity of small dimension tunable MOEMS filters. The devices are fabricated using a multiple InP-air-gap MOEMS technology based on the sacrificial etching of an InP / InGaAs stack A spectral linewidth better than 0.15 nm over a tuning range of 40 nm is experimentally demonstrated. Design improvements for doubling the tuning range are also proposed.
机译：我们描述了基于可变形结构的新型Fabry-Perot可调滤波器的设计和制造，该结构由表面微加工的磷化铟（InP）/空气分布布拉格反射器（DBR）组成。与常规设计相比，通过将谐振腔置于高折射率材料（InP）中而不是空气中，可以实现出色的光谱选择性。预期该配置将显着减少空腔的侧向损耗。该滤波器还具有用于双向静电激励的新型掺杂结构。我们提供的仿真和实验结果证明了这种高折射率腔概念对于提高小尺寸可调谐MOEMS滤波器的选择性的有效性。器件是基于对InP / InGaAs叠层的牺牲刻蚀，使用多重InP气隙MOEMS技术制造的。在40 nm的调谐范围内，实验证明了光谱线宽优于0.15 nm。还提出了将调谐范围加倍的设计改进。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号