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Tunable mechanical resonator with aluminum nitride piezoelectric actuation

机译：具有氮化铝压电驱动的可调机械谐振器

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The electromechanical response of piezoelectrically-actuated A1N micromachined bridge resonators has been characterized using laser interferometry and electrical admittance measurements. We compare the response of microbridges with different dimensions and buckling (induced by the initial residual stress of the layers). The resonance frequencies are in good agreement with numerical simulations of the electromechanical behavior of the structures. We show that it is possible to perform a rough tuning of the resonance frequencies by allowing a determined amount of built-in stress in the microbridge during its fabrication. Once the resonator is made, a DC bias added to the AC excitation signal allows to fine-tune the frequency. Our microbridges yield a tuning factor of around 88 Hz/V for a 500 μm-long microbridge.
机译：压电驱动的AlN微机械桥式谐振器的机电响应已通过激光干涉法和电导率测量进行了表征。我们比较了具有不同尺寸和屈曲的微桥的响应（由层的初始残余应力引起）。共振频率与结构的机电行为的数值模拟非常吻合。我们显示，通过在微桥的制造过程中允许确定量的内置应力，可以对共振频率进行粗调。制成谐振器后，添加到交流激励信号的直流偏置可对频率进行微调。对于500μm长的微桥，我们的微桥产生的调谐因子约为88 Hz / V。

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