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Mechanism and experiment study on photo-thermally excited bilayer silicon microcantilever resonators

机译：光热激发双层硅微悬臂梁谐振器的机理与实验研究

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摘要

Silicon micro-cantilever resonators are typical elements in micro-electro-mechanical systems. Basing on the photothermally excited micro-cantilever resonators, many optical microsystems can be realized, such as micro-swichtes, mciro-modulators and microsensors etc. In this paper, Mechanism and experiment study is given on photothermally excited bi-layered silicon micro-cantilever resonators, and relative results can be served as the basis of further applications. When coating is put on the surface of micro-cantilever to increase the optically exciting efficiency, the whole resonator becomes bi-layered structure, and the mechanism of this bi-layered resonator is very different from those of single material resonators. In this paper, Photo-thermally excited mechanism of bi-layered silicon micro-cantilever was presented and a corresponding photo-thermal theoretical model was set up based on the photo-thermal effect. The first three resonant modes of the silicon micro-cantilever were detected successfully by using piezoelectric resistors fabricated as a Wheat-stone sensing bridge on the micro-cantilever. A novel method was presented to excite and detect the microresonator at the same time by using only one optical source , and this novel method was demonstrated by detecting the first resonant mode of the micro-cantilever.
机译：硅微悬臂梁谐振器是微机电系统中的典型元件。基于光热激发的微悬臂梁谐振器，可以实现许多光学微系统，例如微夹层，微微调制器和微传感器等。本文对光热激发的双层硅微悬臂梁进行了机理和实验研究。谐振器及其相对结果可以作为进一步应用的基础。当在微悬臂梁的表面上镀膜以提高光激发效率时，整个谐振器变为双层结构，并且该双层谐振器的机理与单一材料谐振器的机理大不相同。提出了双层硅微悬臂梁的光热激发机理，并基于光热效应建立了相应的光热理论模型。通过使用作为微悬臂上的小麦石感测桥制造的压电电阻器，成功检测了硅微悬臂的前三个共振模式。提出了一种仅使用一个光源同时激发和检测微谐振器的新方法，并通过检测微悬臂梁的第一谐振模式来证明了该新方法。

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