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Development of Microfabrication Technology for MEMS/MOEMS Applications

机译：MEMS / MOEMS应用的微细加工技术的发展

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摘要

Development of microfabrication technologies for MEMS and MOEMS has been reviewed. Depending on the materials, the fabrication technologies are grouped into silicon and non-silicon processes. Inherited from semiconductor industry, silicon process technology is the dominant technology in manufacturing MEMS and MOEMS. Past and present progresses in silicon micromachining have been described. However, there is a growing trend for non-silicon materials in MEMS and MOEMS devices and systems. Variety of materials can be used, including metals, polymers, glass, ceramics, etc. They often offer better performance and low cost of manufacturing than silicon. Although in research community new microfabrication technologies are constantly being developed, the industry requires as few as possible processing technologies so that the complexity and cost of manufacturing can be greatly reduced. MEMS industry needs standardization so that it can prosper like the semiconductor industry. However, there are great hurdles in standardizing MEMS fabrication technology. The fragmented market and diversity of applications make the standardization much more difficult than the semiconductor industry. One formula of standardization is the establishment of foundries. It has been a magic formula for semiconductor industry, but has not been so magic to the MEMS industry.
机译：回顾了用于MEMS和MOEMS的微细加工技术的发展。根据材料的不同，制造技术可分为硅工艺和非硅工艺。硅工艺技术继承了半导体行业，是制造MEMS和MOEMS的主要技术。已经描述了硅微加工的过去和现在的进展。但是，MEMS和MOEMS器件和系统中的非硅材料有增长的趋势。可以使用多种材料，包括金属，聚合物，玻璃，陶瓷等。它们通常比硅具有更好的性能和较低的制造成本。尽管在研究界中不断在开发新的微细加工技术，但是该行业需要尽可能少的加工技术，从而可以大大降低制造的复杂性和成本。 MEMS行业需要标准化，以使其能够像半导体行业一样繁荣发展。然而，标准化MEMS制造技术存在很大的障碍。市场的分散和应用的多样性使标准化比半导体行业困难得多。建立铸造厂是标准化的一个公式。对于半导体行业而言，这是一个神奇的公式，但对于MEMS行业而言，却并非如此。

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