Analysis on the optical MEMS pressure sensors based on circular multi-layer diaphragm

机译：基于圆形多层膜片的光学MEMS压力传感器分析

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An optical MEMS pressure sensor based on multi-layer circular diaphragm has been analyzed by utilizing the shell theory and characteristic matrix methods. Finite element methods are used to analyze the deflection of circular diaphragm with the residual stress effect considered. Simulation results are given by using FEM software tools ANSYS. The analytic expressions for the absolute reflectance of multi-layer circular diaphragm structure are derived. The results are valid for the most optical MEMS pressure sensors based on Fabry-Perot interferometer.

机译：利用壳理论和特征矩阵方法，对基于多层圆形膜片的光学MEMS压力传感器进行了分析。在考虑残余应力影响的情况下，使用有限元方法分析圆形膜片的挠度。使用FEM软件工具ANSYS给出了仿真结果。推导了多层圆膜结构的绝对反射率的解析表达式。该结果对于基于Fabry-Perot干涉仪的大多数光学MEMS压力传感器是有效的。

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来源
《MEMS/MOEMS Technologies and Applications II》|2004年|P.238-245|共8页
会议地点 Beijing(CN)
作者
Ming Li; Ming Wang; Tinting Wang; Hua Rong; Xuxing Chen;
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作者单位

Dept. of Physics, Nanjing Normal Univ./Nanjing, China, 210097;

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会议组织
原文格式 PDF
正文语种 eng
中图分类微电子学、集成电路（IC）;
关键词
MEMS; pressure sensor; characteristic matrix; residual stress;

机译：MEMS;压力传感器;特征矩阵;残余应力;

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专利

1. Dynamic Analysis of Viscoelastic Circular Diaphragm of a MEMS Capacitive Pressure Sensor using Modified Differential Transformation Method [J] . Olurotimi A. Adeleye, Muritala Yusuf, Oluwaseyi Balogun Karbala International Journal of Modern Science . 2020,第3期

机译：MEMS电容式压力传感器粘弹性圆形隔膜的动态分析方法
2. A novel analytical approach for multi-layer diaphragm-based optical micro electromechanical-system pressure sensors [J] . Li M, Wang M, Rong H, Chinese physics letters . 2006,第5期

机译：基于多层膜片的光学微机电系统压力传感器的新型分析方法
3. A Novel Analytical Approach for Multi-Layer Diaphragm-Based Optical Microelectromechanical-System Pressure Sensors [J] . LI Ming, WANG Ming, RONG Hua, 中国物理快报：英文版 . 2006,第005期

机译：基于多层膜片的光学微机电系统压力传感器的新型分析方法
4. Analysis on the optical MEMS pressure sensors based on circular multilayer diaphragm [C] . Ming Li, Ming Wang, Tinting Wang, Conference on MEMS/MOEMS Technologies and Applications . 2004

机译：基于圆形多层膜片的光学MEMS压力传感器分析
5. MEMS based Fabry Perot pressure sensor and non-adhesive integration on optical fiber by anodic bonding. [D] . Saran, Anish. 2004

机译：基于MEMS的Fabry Perot压力传感器和通过阳极键合在光纤上的非粘合式集成。
6. High-Consistency Optical Fiber Fabry–Perot Pressure Sensor Based on Silicon MEMS Technology for High Temperature Environment [O] . Fei Feng, Pinggang Jia, Jiang Qian, 2021

机译：基于硅MEMS技术的高温环境高一致性光纤法布里 - 珀罗压力传感器
7. Optical MEMS pressure sensor using ring resonator on a circular diaphragm [O] . Pattnaik Prasant K, Vijayaditya BH, Srinivas T, 2005

机译：在圆膜片上使用环形谐振器的光学MEMS压力传感器

Analysis on the optical MEMS pressure sensors based on circular multi-layer diaphragm

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