Structure Design, Fabrication and Characteristics of Polysilicon nano-thin films Resistances Pressure Sensor Based on MEMS Technology

著录项

• 来源
  《International Conference of Chinese Society of Micro-Nano Technology;Annual Conference of the Chinese Society of Micro-Nano Technology》|2010年|p.200-205|共6页
• 会议地点 Xian(CN);Xian(CN)
• 作者

  Xiao-feng Zhao; Dian-zhong Wen; Yang Li; Yuan-xin Hou; Chun-peng Ai; Zhi-qiang Wang; De-jun Xiu;

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• 作者单位

  Key Laboratory of Electronics Engineering, Collage of Heilongjiang Province , Heilongjiang University, Harbin, China;

  Key Laboratory of Electronics Engineering, Collage of Heilongjiang Province , Heilongjiang University, Harbin, China;

  Major Laboratories of integrated circuits, Heilongjiang University, Harbin, China;

  Major Laboratories of integrated circuits, Heilongjiang University, Harbin, China;

  Major Laboratories of integrated circuits, Heilongjiang University, Harbin, China;

  Major Laboratories of integrated circuits, Heilongjiang University, Harbin, China;

  Major Laboratories of integrated circuits, Heilongjiang University, Harbin, China;

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• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类 光学仪器;微电子学、集成电路（IC）;
• 关键词

  polysilicon nano thin films; pressure sensor; microelectromechanical system (MEMS); wheatstone bridge;

  机译：多晶硅纳米薄膜；压力传感器;微机电系统（MEMS）；惠斯通电桥;