Dynamic Characteristics Measurement of Silicon Micro-cantilever in Low Temperature Environment

机译：低温环境下硅微悬臂梁的动态特性测量

获取原文

获取原文并翻译 | 示例

页面导航

摘要
著录项
相似文献
相关主题

摘要

The dynamic testing system for MEMS in low temperature environment has been developed. A thermoelectric cooling refrigerator was utilized to generate the low temperature environment. The base excitation device was established using the piezoelectric ceramic as the driving source. A vacuum chamber was designed to protect the micro-structure from the humid air. Through the base impact excitation, the resonance frequencies are obtained by analyzing the impulse response signals. The frequency response of micro-cantilever was obtained by using both BIST method and laser Doppler vibrometer. The dynamic testing experiments for the silicon micro-cantilever were carried out from -50 ℃ to room temperature. The result shows that the resonance frequency slightly increases with the decreasing temperature. The measurement device is effective to carry out dynamic testing of microstructure from -50 ℃ to room temperature.

机译：开发了用于低温环境下的MEMS动态测试系统。利用热电冷却冰箱产生低温环境。使用压电陶瓷作为驱动源建立了基础激励装置。设计了一个真空室，以保护微结构不受潮湿空气的影响。通过基础冲击激发，通过分析脉冲响应信号来获得共振频率。通过使用BIST方法和激光多普勒振动计，获得了微悬臂梁的频率响应。在-50℃至室温下进行了硅微悬臂梁的动态测试实验。结果表明，共振频率随温度的降低而略有增加。该测量装置有效地进行了从-50℃到室温的微观组织动态测试。

著录项

来源
《International Conference of Chinese Society of Micro-Nano Technology;Annual Conference of the Chinese Society of Micro-Nano Technology》|2010年|p.18-22|共5页
会议地点 Xian(CN);Xian(CN)
作者
She DS; Wang XD; Zhang XW; Wang LD;
展开▼
作者单位

Key Laboratory for Micro/Nano Technology and System of Liao-Ning Province, Dalian 116024, China;

Key Laboratory for Micro/Nano Technology and System of Liao-Ning Province, Dalian 116024, China;

Key Laboratory for Micro/Nano Technology and System of Liao-Ning Province, Dalian 116024, China;

Key Laboratory for Micro/Nano Technology and System of Liao-Ning Province, Dalian 116024, China;

展开▼
会议组织
原文格式 PDF
正文语种 eng
中图分类光学仪器;微电子学、集成电路（IC）;
关键词
MEMS measurement; dynamic testing; low temperature environment; micro cantilever;

机译：MEMS测量；动态测试；低温环境；微悬臂;

相似文献

外文文献
中文文献
专利

1. Measurement of the temperature coefficient of Young's modulus of single crystal silicon and 3C silicon carbide below 273 K using micro-cantilevers [J] . Boyd E.J., Li L., Blue R., Sensors and Actuators, A. Physical . 2013,第Null期

机译：使用微悬臂梁在273 K以下测量单晶硅和3C碳化硅的杨氏模量的温度系数
2. Assurance of temperature dynamic measurements uniformity and methods for determining the total dynamic characteristics of the water flow variable temperature standard sensors [J] . S. A. Kocharyan, G. N. Solopchenko Измерительная техниκа . 2002,第8期

机译：确保温度动态测量的一致性以及确定水流可变温度标准传感器总动态特性的方法
3. Assurance of temperature dynamic measurements uniformity and methods for determining the total dynamic characteristics of the water flow variable temperature standard sensors [J] . S. A. Kocharyan, G. N. Solopchenko Измерительная техниκа . 2002,第8期

机译：保证温度动态测量均匀性和方法，用于确定水流量可变温度标准传感器的总动态特性
4. Dynamic Characteristics Measurement of Silicon Micro-cantilever in Low Temperature Environment [C] . She DS, Wang XD, Zhang XW Annual Conference of the Chinese Society of Micro-Nano Technology . 2011

机译：低温环境中硅微悬臂的动态特性测量
5. Low temperature measurement of silicon/silicon dioxide interface roughness and interface trapped charge in metal-oxide-semiconductor devices. [D] . Anderson, Warren Robert. 1993

机译：金属氧化物半导体器件中硅/二氧化硅界面粗糙度和界面捕获电荷的低温测量。
6. Temperature Effect on Capillary Flow Dynamics in 1D Array of Open Nanotextured Microchannels Produced by Femtosecond Laser on Silicon [O] . Ranran Fang, Hongbo Zhu, Zekai Li, 2020

机译：温度对飞秒激光在硅上产生的一维开放纳米纹理微通道一维阵列中毛细管流动动力学的影响
7. Heat Transfer Characteristics of Natural Convection in Low-density Environment Flow visualization and temperature measurement by laser interferometry [O] . Naoki MARUYAMA, Masanori YOSHIMOTO, Shiro NISHIDA, 2007

机译：低密度环境流动可视化和激光干涉测量的热传递特性
8. Aerodynamic Characteristics, Temperature, and Noise Measurements of a Large-Scale External-Flow Jet-Augmented-Flap Model with Turbojet Engines Operating [R] . Fink, Marvin P. 1961

机译：涡轮喷气发动机运行的大型外流喷射增强襟翼模型的气动特性，温度和噪声测量

Dynamic Characteristics Measurement of Silicon Micro-cantilever in Low Temperature Environment

摘要

著录项

相似文献

相关主题

期刊订阅