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Rapid Microfluidc Biochips Fabrication by Femtosecond Laser on Glass Substrate

机译:飞秒激光在玻璃基板上快速制备微流控生物芯片

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This paper uses a femtosecond laser scriber to perform the direct-writing ablation of glass substrate for the development of microfluidic biochips. The surface quality of the ablated microchannels was examined by scanning electron microscopy (SEM) and atomic force microscopy (AFM) measurement techniques. The developed femtosecond laser ablation system provides a versatile and economic approach for the fabrication of glass-base microfluidic chips. In the laser writing process, the desired microfluidic patterns are designed using commercial computer software and are then transferred to the laser scriber to ablate the trenches. The results show that a very smooth channel wall can be achieved through the annealing process at the temperature 650℃ and 5 hours. The system provides an economic and powerful means of rapid glass microfluidic biochips development.
机译:本文使用飞秒激光划片器对玻璃基板进行直接刻蚀,以开发微流控生物芯片。通过扫描电子显微镜(SEM)和原子力显微镜(AFM)测量技术检查了烧蚀的微通道的表面质量。先进的飞秒激光烧蚀系统为玻璃基微流控芯片的制造提供了一种通用且经济的方法。在激光写入过程中,使用商用计算机软件设计所需的微流控图案,然后将其转移到激光划片器上以烧蚀沟槽。结果表明,通过在650℃和5小时的温度下进行退火,可以获得非常光滑的通道壁。该系统提供了快速开发玻璃微流体生物芯片的经济有效的手段。

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