The Study of Humidity Effect on Self-heated Surface Micromachined Polysilicon Resistor

著录项

• 来源
  《International Conference of Chinese Society of Micro-Nano Technology;Annual Conference of the Chinese Society of Micro-Nano Technology》|2010年|p.775-778|共4页
• 会议地点 Xian(CN);Xian(CN)
• 作者

  Hongyu Ma; Weidong Zhang; Enjie Ding;

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• 作者单位

  Research Center for Internet of Things, China University of Mining and Technology, Xuzhou 221116, P.R.China;

  Research Center for Internet of Things, China University of Mining and Technology, Xuzhou 221116, P.R.China;

  Research Center for Internet of Things, China University of Mining and Technology, Xuzhou 221116, P.R.China;

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• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类 光学仪器;微电子学、集成电路（IC）;
• 关键词

  humidity; polysilicon; thermal conductivity;

  机译：湿度;多晶硅导热系数;