Design and simulation of a differential and decoupled micromachined gyroscope

著录项

• 来源
  《International Conference of Chinese Society of Micro-Nano Technology;Annual Conference of the Chinese Society of Micro-Nano Technology》|2010年|p.674-678|共5页
• 会议地点 Xian(CN);Xian(CN)
• 作者

  Yang. Liu; Lingyun. Wang; Tingping. Lei; Jiang. Du; Yiwen. Jiang; Daoheng. Sun;

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• 作者单位

  Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen, Fujian, China;

  Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen, Fujian, China;

  Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen, Fujian, China;

  Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen, Fujian, China;

  Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen, Fujian, China;

  Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen, Fujian, China;

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• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类 光学仪器;微电子学、集成电路（IC）;
• 关键词

  gyroscope; decoupled; differential detection;

  机译：陀螺仪解耦差异检测;