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Preparation of oxinitride optical waveguides with piezoelectric modulation fabricated by silicon micromachining

机译：硅微机械加工制备具有压电调制性能的氧氮化物光波导

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Abstract: This paper presents the design and the fabrication steps of a novel integrated Mach-Zehnder interferometer with a phase modulation. A well-controlled Si machining as well as ZnO thin-film transducer integration on the same Silicon substrate permits to transform an optically passive device to an active device with sinusoidal phase modulation of 1.3 rad. !6

机译：摘要：本文介绍了一种新型的带相位调制的集成马赫曾德尔干涉仪的设计和制造步骤。在同一硅基板上进行良好控制的Si加工以及ZnO薄膜换能器集成，可以将光学无源器件转换为具有1.3 rad正弦相位调制的有源器件。！6

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《Microsystems Metrology and Inspection》|1999年|p.47-52|共6页
会议地点 Munich(DE)
作者
Christophe Gorecki; Univ. de Franche-Comte; Montboillon; France.;
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原文格式 PDF
正文语种 eng
中图分类 TH1;
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专利

1. Optimization of plasma-deposited silicon oxinitride films for optical channel waveguides [J] . Christophe Gorecki Optics and Lasers in Engineering . 2000,第1期

机译：用于光通道波导的等离子沉积氧氮化硅膜的优化
2. Self-alignment of optical fibers with optical quality end-polishedsilicon rib waveguides using wet chemical micromachining techniques [J] . Rosa M.A., Ngo N.Q., Sweatman D., IEEE journal of selected topics in quantum electronics . 1999,第5期

机译：使用湿化学微加工技术对具有光学质量的末端抛光硅肋形波导的光纤进行自对准
3. Self-alignment of optical fibers with optical quality end-polished silicon rib waveguides using wet chemical micromachining techniques [J] . Rosa M.A., Ngo N.Q. IEEE journal of selected topics in quantum electronics . 1999,第5期

机译：使用湿化学微加工技术对具有光学质量的末端抛光硅肋波导的光纤进行自对准
4. Preparation of oxinitride optical waveguides with piezoelectric midulation fabricated by silicon micromachining [C] . C. Gorecki (Fellow SPIE) Conference on microsystems metrology and inspection . 1999

机译：用硅微机械制造的压电中介氧氮化物光波导的制备
5. Optical phase modulation beam steering using silicon micromachined and hybrid integrated Micro-Electro-Mechanical Systems (MEMS). [D] . Tuantranont, Adisorn. 2001

机译：使用硅微机械和混合集成微机电系统（MEMS）进行光相位调制光束控制。
6. On-chip integratable all-optical quantizer using strong cross-phase modulation in a silicon-organic hybrid slot waveguide [O] . Zhe Kang, Jinhui Yuan, Xianting Zhang, -1

机译：硅-有机混合缝隙波导中利用强交叉相位调制的片上可集成全光量化器
7. Self-Alignment of Optical Fibers with Optical Quality End-Polished Silicon Rib Waveguides Using Wet Chemical Micromachining Techniques [O] . Rosa M., Sweatman Denis, Dimitrijev Sima, 1999

机译：使用湿化学微加工技术对光学质量端抛光的硅肋波导进行光纤自对准
8. Silicon Micromechanical Optical Waveguide for Modulation and Sensing [R] . Churenkov, A. V. 1995

机译：用于调制和传感的硅微机械光波导

Preparation of oxinitride optical waveguides with piezoelectric modulation fabricated by silicon micromachining

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