Preparation of oxinitride optical waveguides with piezoelectric midulation fabricated by silicon micromachining

机译：用硅微机械制造的压电中介氧氮化物光波导的制备

获取原文

页面导航

摘要
著录项
相似文献
相关主题

摘要

This paper presents the design and the fabrication steps of a novel integrated Mach-Zehnder interferometer with a phase modulation. A well-controlled Si machining as well as ZnO thin-film transducer integration on the same Silicon substrate permits to transform an optically passive device to an active device with sinusoidal phase modulation of 1.3 rad.

机译：本文提出了一种具有相位调制的新型集成马赫Zehnder干涉仪的设计和制造步骤。在相同的硅衬底上的ZnO薄膜换能器集成良好控制的SI加工允许将光学被动装置转换为具有1.3 rad的正弦相位调制的有源器件。

著录项

来源
《Conference on microsystems metrology and inspection》|1999年||共6页
会议地点
作者
C. Gorecki (Fellow SPIE);
展开▼
作者单位

展开▼
会议组织
原文格式 PDF
正文语种
中图分类机械学（机械设计基础理论）;
关键词

相似文献

外文文献
中文文献
专利

1. Optimization of plasma-deposited silicon oxinitride films for optical channel waveguides [J] . Christophe Gorecki Optics and Lasers in Engineering . 2000,第1期

机译：用于光通道波导的等离子沉积氧氮化硅膜的优化
2. Self-alignment of optical fibers with optical quality end-polishedsilicon rib waveguides using wet chemical micromachining techniques [J] . Rosa M.A., Ngo N.Q., Sweatman D., IEEE journal of selected topics in quantum electronics . 1999,第5期

机译：使用湿化学微加工技术对具有光学质量的末端抛光硅肋形波导的光纤进行自对准
3. Self-alignment of optical fibers with optical quality end-polished silicon rib waveguides using wet chemical micromachining techniques [J] . Rosa M.A., Ngo N.Q. IEEE journal of selected topics in quantum electronics . 1999,第5期

机译：使用湿化学微加工技术对具有光学质量的末端抛光硅肋波导的光纤进行自对准
4. Preparation of oxinitride optical waveguides with piezoelectric midulation fabricated by silicon micromachining [C] . C. Gorecki (Fellow SPIE) Conference on microsystems metrology and inspection . 1999

机译：用硅微机械制造的压电中介氧氮化物光波导的制备
5. Integration of benzocyclobutene polymers and silicon micromachined structures fabricated with anisotropic wet etching. [D] . Ghalichechian, Nima. 2005

机译：苯并环丁烯聚合物与采用各向异性湿法刻蚀制造的硅微机械结构的集成。
6. Millimeter-Wave Substrate Integrated Waveguide Using Micromachined Tungsten-Coated Through Glass Silicon Via Structures [O] . Ik-Jae Hyeon, Chang-Wook Baek 2018

机译：使用微加工钨涂层玻璃硅通孔结构的毫米波基片集成波导
7. Self-Alignment of Optical Fibers with Optical Quality End-Polished Silicon Rib Waveguides Using Wet Chemical Micromachining Techniques [O] . Rosa M., Sweatman Denis, Dimitrijev Sima, 1999

机译：使用湿化学微加工技术对光学质量端抛光的硅肋波导进行光纤自对准
8. Low-Voltage Rotary Actuator Fabricated Using a Five-Level Polysilicon Surface211 Micromachining Technology [R] . Jakubczak, Krygowski, Miller, 1999

机译：采用五级多晶硅surface211微加工技术制造的低压旋转执行器

Preparation of oxinitride optical waveguides with piezoelectric midulation fabricated by silicon micromachining

摘要

著录项

相似文献

相关主题

期刊订阅