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首页> 外文会议>Nano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines >A comparative microtribological investigation of diamond-like carbon films for applications in microsystems
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A comparative microtribological investigation of diamond-like carbon films for applications in microsystems

机译：类金刚石碳膜在微系统中的应用比较微生物学研究

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摘要

This study reports on the microfrictional properties under reciprocating sliding of different types of commercially available diamond-like carbon (DLC) films, prepared using low and high frequency plasma-assisted chemical vapor deposition (PACVD) and the vacuum arc method. Silicon and sapphire balls were used as counterbodies. Friction-load curves suggest that, for applied forces in the μN to mN regime, two properties have a strong influence on the microfriction: First, the chemical composition plays a dominant role and second, the film roughness. With silicon against DLC, microfriction of hydrogen-free DLC films was greater than the hydrogen containing films. With sapphire counterbodies, microfriction was inversely proportional to film roughness. For all films tested, microfriction was independent of the sliding velocity. Mild wear in the form of scratches was observed only on silicon, while no wear could be detected on any of the DLC films. These results illustrate the utility of implementing microtribological testing in a coating development for microsystems.
机译：这项研究报告了使用低频和高频等离子体辅助化学气相沉积（PACVD）和真空电弧法制备的不同类型的市售类金刚石碳（DLC）薄膜在往复滑动下的微观摩擦性能。硅和蓝宝石球被用作counter体。摩擦载荷曲线表明，对于从μN到mN的施加力，两个属性对微摩擦有很大影响：首先，化学成分起主要作用，其次，薄膜粗糙度。用硅对抗DLC，无氢DLC膜的显微摩擦大于含氢膜。对于蓝宝石假体，微摩擦与膜的粗糙度成反比。对于所有测试的薄膜，微摩擦与滑动速度无关。仅在硅上观察到以划痕形式的轻微磨损，而在任何DLC膜上均未检测到磨损。这些结果说明了在微系统涂层开发中实施微生物学测试的实用性。

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