Design and Performance of a Microengine Realized with Arrays of Asymmetrical Electrothermal Polysilicon Surface Micromachined Microactuators

机译：利用非对称电热多晶硅表面微机械微执行器阵列实现微引擎的设计与性能

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This research focuses on the design and experimental characterization of two types of MEMS asymmetrical electrothermal microactuators. Both microactuator design variants use resistive (Joule) heating to generate thermal expansion and movement. Deflection and force measurements of both microactuators as a function of applied electrical power are presented. Also described is the practical integration of the electrothermal microactuators in a monolithic microengine that is capable of rotating a set of gears.

机译：这项研究的重点是两种类型的MEMS非对称电热微致动器的设计和实验特性。两种微致动器设计变型均使用电阻（焦耳）加热来产生热膨胀和运动。给出了两个微致动器的挠度和力测量值与所施加电功率的关系。还描述了电热微致动器在能够旋转一组齿轮的整体式微引擎中的实际集成。

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来源
《Nano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines》|2002年|p.93-98|共6页
会议地点 Boston MA(US);Boston MA(US)
作者
Edward S. Kolesar; Matthew D. Ruff; William E. Odom; Joseph A. Jayachandran; Justin B. McAllister; Simon Y. Ko; Jeffery T. Howard; Peter B. Allen; Josh M. Wilken; Noah C. Boydston; Jorge E. Bosch; Richard J. Wilks;
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Texas Christian University, Department of Engineering TCU Box 298640, 2800 South University Drive Fort Worth, TX 76129 U.S.A.;

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原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
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专利

1. Single- and double-hot arm asymmetrical polysilicon surface micromachined electrothermal microactuators applied to realize a microengine [J] . Edward S. Kolesar, Matthew D. Ruff, William E. Odom, Thin Solid Films . 2002,第Dec期

机译：单，双热臂不对称多晶硅表面微加工电热微执行器用于实现微引擎
2. Design and pressure analysis for bulk-micromachined electrothermal hydraulic microactuators using a PCM [J] . Lee JS, Lucyszyn S Sensors and Actuators, A. Physical . 2007,第2期

机译：使用PCM的大体积微加工电热液压微执行器的设计和压力分析
3. Design and performance of an electrothermal MEMS microengine capable of bi-directional motion [J] . Edward S. Kolesar, William E. Odom, Joseph A. Jayachandran, Thin Solid Films . 2004,第Jan期

机译：可双向运动的电热MEMS微引擎的设计和性能
4. Design and performance of a microengine realized with arrays of asymmetrical electrothermal polysilicon surface micromachined microactuators [C] . Edward S.Kolesar, Matthew D.Ruff, William E.Odom, Materials Research Society Symposium . 2003

机译：用不对称电热多晶硅表面微机械微耦合微致动器实现的微发炎的设计和性能
5. Design, fabrication, position sensing, and control of electrostatic, surface-micromachined polysilicon microactuators. [D] . Cheung, Patrick Ching-Pak. 1995

机译：静电，表面微机械加工的多晶硅微致动器的设计，制造，位置感测和控制。
6. Electrothermal Microactuators With Peg Drive Improve Performance for Brain Implant Applications [O] . Sindhu Anand, Jemmy Sutanto, Michael S. Baker, -1

机译：具有PEG驱动器的电热微致动力提高脑植入应用的性能
7. Linkage Design Effect on the Reliability of Surface Micromachined Microengines Driving a Load [O] . Danelle M. Tanner, Kenneth A. Peterson, Lloyd W. Irwin, 2015

机译：连杆设计对表面微加工微动力驱动负荷可靠性的影响
8. Monolithic geared-mechanisms driven by a polysilicon surface-micromachined on-chip electrostatic microengine [R] . Sniegowski, J. J. , Miller, S. L. , LaVigne, G. F. , 1996

机译：由多晶硅表面微机械片上静电微引擎驱动的单片齿轮机构

Design and Performance of a Microengine Realized with Arrays of Asymmetrical Electrothermal Polysilicon Surface Micromachined Microactuators

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