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首页> 外文会议>Nanostructured metal oxides for advanced applications >Effect of Silver thickness and Annealing on Optical and Electrical Properties of Nb_2O_5/Ag/Nb_2O_5 Multilayers as Transparent Composite Electrode on Flexible Substrate
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Effect of Silver thickness and Annealing on Optical and Electrical Properties of Nb_2O_5/Ag/Nb_2O_5 Multilayers as Transparent Composite Electrode on Flexible Substrate

机译：银厚度和退火对柔性基板上作为透明复合电极的Nb_2O_5 / Ag / Nb_2O_5多层膜的光电性能的影响

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摘要

Multilayer structures of Nb_2O_5/Ag/Nb_2O_5 have been deposited onto flexible substrates by sputtering at room temperature to develop indium free composite transparent conductive electrodes. The optical and electrical properties of the multilayers are measured by UV-Visible spectroscopy, Hall measurement and four point probe and the effect of Ag thickness has been studied. The critical thickness of Ag to form a continuous conducting layer is found to be 9.5 nm and the multilayer stack has been optimized to obtain a sheet resistance of 7.2 Ω/sq and an average optical transmittance of 86 % at 550 nm. The Haacke figure of merit (FOM) has been calculated for the films, and the multilayer with 9.5 nm thick Ag layer has the highest FOM with 31.5 × 10~(-3) Ω/sq, which is one of the best FOM reported till date for room temperature deposition on flexible substrates. The multilayered samples are annealed in vacuum, forming gas, air and O_2 environments and the optical and electrical properties are compared against the as-deposited samples.
机译：Nb_2O_5 / Ag / Nb_2O_5的多层结构已通过室温溅射沉积在柔性基板上，以开发无铟复合透明导电电极。通过UV-可见光谱，霍尔测量和四点探针测量了多层的光学和电学性质，并且研究了Ag厚度的影响。发现形成连续导电层的银的临界厚度为9.5 nm，并且对该多层堆叠进行了优化，以在550 nm下获得7.2Ω/ sq的薄层电阻和86％的平均透光率。已经计算出薄膜的Haacke品质因数（FOM），具有9.5 nm厚的Ag层的多层膜的FOM最高，为31.5×10〜（-3）Ω/ sq，是迄今为止报道的最好的FOM之一。在柔性基板上室温沉积的日期。将多层样品在真空中退火，形成气体，空气和O_2环境，然后将光学和电学性质与沉积后的样品进行比较。

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  • 会议地点 San Francisco CA(US)
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    Aritra Dhar; T. L. Alford;

  • 作者单位

    Department of Chemistry and Biochemistry, Arizona State University, Tempe, Arizona 85287;

    Department of Chemistry and Biochemistry, Arizona State University, Tempe, Arizona 85287,School for Engineering of Matter, Transport, and Energy, Arizona State University, Tempe, Arizona 85287;

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